JPS6457640U - - Google Patents

Info

Publication number
JPS6457640U
JPS6457640U JP1987149247U JP14924787U JPS6457640U JP S6457640 U JPS6457640 U JP S6457640U JP 1987149247 U JP1987149247 U JP 1987149247U JP 14924787 U JP14924787 U JP 14924787U JP S6457640 U JPS6457640 U JP S6457640U
Authority
JP
Japan
Prior art keywords
outside air
air blocking
specimen
plastic mold
unsealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987149247U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0541548Y2 (US08063081-20111122-C00044.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987149247U priority Critical patent/JPH0541548Y2/ja
Priority to US07/199,708 priority patent/US4826556A/en
Publication of JPS6457640U publication Critical patent/JPS6457640U/ja
Application granted granted Critical
Publication of JPH0541548Y2 publication Critical patent/JPH0541548Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67126Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1987149247U 1987-10-01 1987-10-01 Expired - Lifetime JPH0541548Y2 (US08063081-20111122-C00044.png)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1987149247U JPH0541548Y2 (US08063081-20111122-C00044.png) 1987-10-01 1987-10-01
US07/199,708 US4826556A (en) 1987-10-01 1988-05-27 Plastic mold decapsuling apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987149247U JPH0541548Y2 (US08063081-20111122-C00044.png) 1987-10-01 1987-10-01

Publications (2)

Publication Number Publication Date
JPS6457640U true JPS6457640U (US08063081-20111122-C00044.png) 1989-04-10
JPH0541548Y2 JPH0541548Y2 (US08063081-20111122-C00044.png) 1993-10-20

Family

ID=15471092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987149247U Expired - Lifetime JPH0541548Y2 (US08063081-20111122-C00044.png) 1987-10-01 1987-10-01

Country Status (2)

Country Link
US (1) US4826556A (US08063081-20111122-C00044.png)
JP (1) JPH0541548Y2 (US08063081-20111122-C00044.png)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227000A (en) * 1990-04-09 1993-07-13 Nippon Scientific Co., Ltd. Plasma etching apparatus with accurate temperature and voltage level control on device under test
JP2504607B2 (ja) * 1990-06-14 1996-06-05 株式会社東芝 半導体製造装置及び製造方法
US5252179A (en) * 1992-09-28 1993-10-12 International Business Machines Corporation Apparatus and method for selectively etching a plastic encapsulating material
US5443675A (en) * 1993-09-15 1995-08-22 Wensink; Ben L. Plastic mold package device decapsulator with flat, separate etch head and etch plate
US5932061A (en) * 1996-10-29 1999-08-03 Sun Microsystems, Inc. Board Level Decapsulator
US6197209B1 (en) 1995-10-27 2001-03-06 Lg. Philips Lcd Co., Ltd. Method of fabricating a substrate
US6043100A (en) * 1996-04-19 2000-03-28 Weaver; Kevin Chip on tape die reframe process
US5766496A (en) * 1996-05-31 1998-06-16 Nisene Technology Group, Inc. Decapsulator and method for decapsulating plastic encapsulated device
US5783098A (en) * 1996-05-31 1998-07-21 Nisene Technology Group Decapsulator and method for decapsulating plastic encapsulated device
US6630052B1 (en) 1996-06-26 2003-10-07 Lg. Philips Lcd Co., Ltd. Apparatus for etching glass substrate
KR0180850B1 (ko) 1996-06-26 1999-03-20 구자홍 유리기판 에칭장치
US5792305A (en) * 1996-07-12 1998-08-11 Nisene Technology Group Fixture for decapsulating plastic encapsulated electronic device packages
KR100265556B1 (ko) 1997-03-21 2000-11-01 구본준 식각장치
JPH1177512A (ja) * 1997-09-09 1999-03-23 Oki Electric Ind Co Ltd 表面実装パッケージのリード端子自動研磨方法及びその自動研磨装置
US6327011B2 (en) * 1997-10-20 2001-12-04 Lg Electronics, Inc. Liquid crystal display device having thin glass substrate on which protective layer formed and method of making the same
KR20000067106A (ko) * 1999-04-23 2000-11-15 구본준 유리기판 에칭장치
JP3340675B2 (ja) * 1998-05-26 2002-11-05 日本サイエンティフィック株式会社 プラスチックモールド開封装置
US6054012A (en) * 1998-06-29 2000-04-25 Intersil Corporation Decapsulating method and apparatus for integrated circuit packages
KR100272513B1 (ko) * 1998-09-08 2001-01-15 구본준 유리기판의 식각장치
KR100308157B1 (ko) 1998-10-22 2001-11-15 구본준, 론 위라하디락사 액정표시소자용 유리기판
US6409878B1 (en) * 2000-04-18 2002-06-25 Advanced Micro Devices, Inc. Automatic decapsulation system utilizing an acid resistant, high heat endurance and flexible sheet coupled to a rubber gasket and a method of use
US6368886B1 (en) 2000-09-15 2002-04-09 The Charles Stark Draper Laboratory, Inc. Method of recovering encapsulated die
US6395129B1 (en) * 2000-11-27 2002-05-28 Advanced Micro Devices, Inc. Process to decapsulate a FBGA package
US6517666B2 (en) * 2001-03-27 2003-02-11 Advanced Micro Devices, Inc. Automatic decapsulation system utilizing an integrated spacer/protection plate
WO2002089192A1 (en) * 2001-04-27 2002-11-07 Koninklijke Philips Electronics N.V. Method of wet etching an inorganic antireflection layer
US6709888B2 (en) * 2002-07-26 2004-03-23 Motorola, Inc. Method of decapsulating a packaged copper-technology integrated circuit
US7981698B2 (en) * 2007-03-09 2011-07-19 The Charles Stark Draper Laboratory, Inc. Removal of integrated circuits from packages
JP6278677B2 (ja) * 2013-12-03 2018-02-14 日本サイエンティフィック株式会社 プラスチックモールドされた半導体集積回路パッケージの開封装置及びプラスチックモールドされた半導体集積回路パッケージの開封方法
US10510568B2 (en) * 2015-10-20 2019-12-17 Rkd Engineering Corporation Corrosion inhibitor injection apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5878633U (ja) * 1981-11-25 1983-05-27 日本電気株式会社 樹脂溶解装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4344809A (en) * 1980-09-29 1982-08-17 Wensink Ben L Jet etch apparatus for decapsulation of molded devices
US4359360A (en) * 1981-12-10 1982-11-16 The United States Of America As Represented By The Secretary Of The Air Force Apparatus for selectively jet etching a plastic encapsulating an article

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5878633U (ja) * 1981-11-25 1983-05-27 日本電気株式会社 樹脂溶解装置

Also Published As

Publication number Publication date
US4826556A (en) 1989-05-02
JPH0541548Y2 (US08063081-20111122-C00044.png) 1993-10-20

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