JPS6457584A - Resistance heating element - Google Patents
Resistance heating elementInfo
- Publication number
- JPS6457584A JPS6457584A JP21409987A JP21409987A JPS6457584A JP S6457584 A JPS6457584 A JP S6457584A JP 21409987 A JP21409987 A JP 21409987A JP 21409987 A JP21409987 A JP 21409987A JP S6457584 A JPS6457584 A JP S6457584A
- Authority
- JP
- Japan
- Prior art keywords
- coil
- heating element
- silicon carbide
- shaped material
- resistance heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To use a resistance heating element in the air without anxiety, secure the coil elasticity and the strength at a high temperature, and obtain the very wide application range in designing a furnace by constituting the resistance heating element with a silicon carbide material with a coil shape. CONSTITUTION:A mixture of one kind or two kinds or more of coke, carbon black, pitch, fiber, synthetic resin is used as a starting raw material, it is molded into a linear body then formed into a coil shape and made infusible, and the infusible coil-shaped material is heated and baked within the range of 700-2300 deg.C. The coil-shaped material thus obtained is reacted with silicon monoxide in the temperature region of 1700-2300 deg.C into silicon carbide. Silicon monoxide gas is diffused and infiltrated in a carbonaceous coil-shaped material thus obtained to convert the carbonaceous coil-shaped material into silicon carbide by the conversion method, thus the molded shape is kept for the conversion into silicon carbide, and no post-machining is required. Cracks on a heating element caused by the stress generated in the heating element are eliminated, and flexibility is given to the design of a furnace.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62214099A JPH0644506B2 (en) | 1987-08-27 | 1987-08-27 | Resistance heating element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62214099A JPH0644506B2 (en) | 1987-08-27 | 1987-08-27 | Resistance heating element |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32769891A Division JPH0513154A (en) | 1991-12-11 | 1991-12-11 | Manufacture of resistant heating element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6457584A true JPS6457584A (en) | 1989-03-03 |
JPH0644506B2 JPH0644506B2 (en) | 1994-06-08 |
Family
ID=16650207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62214099A Expired - Lifetime JPH0644506B2 (en) | 1987-08-27 | 1987-08-27 | Resistance heating element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0644506B2 (en) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54101525A (en) * | 1978-01-27 | 1979-08-10 | Tokai Konetsu Kogyo Kk | Method of making heater of silicon carbide |
JPS56146929A (en) * | 1980-04-14 | 1981-11-14 | Ngk Spark Plug Co Ltd | Igniter heat generator |
JPS6069492U (en) * | 1983-10-20 | 1985-05-16 | 東海高熱工業株式会社 | silicon carbide heating element |
JPS60131783A (en) * | 1983-12-20 | 1985-07-13 | 三菱鉛筆株式会社 | Method of producing carbon heater |
JPS62117288A (en) * | 1985-11-18 | 1987-05-28 | 東芝セラミツクス株式会社 | Heater for semiconductor heat treatment furnace |
JPS62243278A (en) * | 1986-04-15 | 1987-10-23 | 田中貴金属工業株式会社 | Ceramics heater |
JPS62243277A (en) * | 1986-04-14 | 1987-10-23 | 東芝セラミックス株式会社 | Silicon carbide heating unit |
-
1987
- 1987-08-27 JP JP62214099A patent/JPH0644506B2/en not_active Expired - Lifetime
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54101525A (en) * | 1978-01-27 | 1979-08-10 | Tokai Konetsu Kogyo Kk | Method of making heater of silicon carbide |
JPS56146929A (en) * | 1980-04-14 | 1981-11-14 | Ngk Spark Plug Co Ltd | Igniter heat generator |
JPS6069492U (en) * | 1983-10-20 | 1985-05-16 | 東海高熱工業株式会社 | silicon carbide heating element |
JPS60131783A (en) * | 1983-12-20 | 1985-07-13 | 三菱鉛筆株式会社 | Method of producing carbon heater |
JPS62117288A (en) * | 1985-11-18 | 1987-05-28 | 東芝セラミツクス株式会社 | Heater for semiconductor heat treatment furnace |
JPS62243277A (en) * | 1986-04-14 | 1987-10-23 | 東芝セラミックス株式会社 | Silicon carbide heating unit |
JPS62243278A (en) * | 1986-04-15 | 1987-10-23 | 田中貴金属工業株式会社 | Ceramics heater |
Also Published As
Publication number | Publication date |
---|---|
JPH0644506B2 (en) | 1994-06-08 |
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Legal Events
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EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 14 Free format text: PAYMENT UNTIL: 20080608 |