JPS6457584A - Resistance heating element - Google Patents

Resistance heating element

Info

Publication number
JPS6457584A
JPS6457584A JP21409987A JP21409987A JPS6457584A JP S6457584 A JPS6457584 A JP S6457584A JP 21409987 A JP21409987 A JP 21409987A JP 21409987 A JP21409987 A JP 21409987A JP S6457584 A JPS6457584 A JP S6457584A
Authority
JP
Japan
Prior art keywords
coil
heating element
silicon carbide
shaped material
resistance heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21409987A
Other languages
Japanese (ja)
Other versions
JPH0644506B2 (en
Inventor
Yasuhiro Obara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP62214099A priority Critical patent/JPH0644506B2/en
Publication of JPS6457584A publication Critical patent/JPS6457584A/en
Publication of JPH0644506B2 publication Critical patent/JPH0644506B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To use a resistance heating element in the air without anxiety, secure the coil elasticity and the strength at a high temperature, and obtain the very wide application range in designing a furnace by constituting the resistance heating element with a silicon carbide material with a coil shape. CONSTITUTION:A mixture of one kind or two kinds or more of coke, carbon black, pitch, fiber, synthetic resin is used as a starting raw material, it is molded into a linear body then formed into a coil shape and made infusible, and the infusible coil-shaped material is heated and baked within the range of 700-2300 deg.C. The coil-shaped material thus obtained is reacted with silicon monoxide in the temperature region of 1700-2300 deg.C into silicon carbide. Silicon monoxide gas is diffused and infiltrated in a carbonaceous coil-shaped material thus obtained to convert the carbonaceous coil-shaped material into silicon carbide by the conversion method, thus the molded shape is kept for the conversion into silicon carbide, and no post-machining is required. Cracks on a heating element caused by the stress generated in the heating element are eliminated, and flexibility is given to the design of a furnace.
JP62214099A 1987-08-27 1987-08-27 Resistance heating element Expired - Lifetime JPH0644506B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62214099A JPH0644506B2 (en) 1987-08-27 1987-08-27 Resistance heating element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62214099A JPH0644506B2 (en) 1987-08-27 1987-08-27 Resistance heating element

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP32769891A Division JPH0513154A (en) 1991-12-11 1991-12-11 Manufacture of resistant heating element

Publications (2)

Publication Number Publication Date
JPS6457584A true JPS6457584A (en) 1989-03-03
JPH0644506B2 JPH0644506B2 (en) 1994-06-08

Family

ID=16650207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62214099A Expired - Lifetime JPH0644506B2 (en) 1987-08-27 1987-08-27 Resistance heating element

Country Status (1)

Country Link
JP (1) JPH0644506B2 (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101525A (en) * 1978-01-27 1979-08-10 Tokai Konetsu Kogyo Kk Method of making heater of silicon carbide
JPS56146929A (en) * 1980-04-14 1981-11-14 Ngk Spark Plug Co Ltd Igniter heat generator
JPS6069492U (en) * 1983-10-20 1985-05-16 東海高熱工業株式会社 silicon carbide heating element
JPS60131783A (en) * 1983-12-20 1985-07-13 三菱鉛筆株式会社 Method of producing carbon heater
JPS62117288A (en) * 1985-11-18 1987-05-28 東芝セラミツクス株式会社 Heater for semiconductor heat treatment furnace
JPS62243278A (en) * 1986-04-15 1987-10-23 田中貴金属工業株式会社 Ceramics heater
JPS62243277A (en) * 1986-04-14 1987-10-23 東芝セラミックス株式会社 Silicon carbide heating unit

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101525A (en) * 1978-01-27 1979-08-10 Tokai Konetsu Kogyo Kk Method of making heater of silicon carbide
JPS56146929A (en) * 1980-04-14 1981-11-14 Ngk Spark Plug Co Ltd Igniter heat generator
JPS6069492U (en) * 1983-10-20 1985-05-16 東海高熱工業株式会社 silicon carbide heating element
JPS60131783A (en) * 1983-12-20 1985-07-13 三菱鉛筆株式会社 Method of producing carbon heater
JPS62117288A (en) * 1985-11-18 1987-05-28 東芝セラミツクス株式会社 Heater for semiconductor heat treatment furnace
JPS62243277A (en) * 1986-04-14 1987-10-23 東芝セラミックス株式会社 Silicon carbide heating unit
JPS62243278A (en) * 1986-04-15 1987-10-23 田中貴金属工業株式会社 Ceramics heater

Also Published As

Publication number Publication date
JPH0644506B2 (en) 1994-06-08

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