JPS6457180A - Test probe apparatus - Google Patents
Test probe apparatusInfo
- Publication number
- JPS6457180A JPS6457180A JP62212734A JP21273487A JPS6457180A JP S6457180 A JPS6457180 A JP S6457180A JP 62212734 A JP62212734 A JP 62212734A JP 21273487 A JP21273487 A JP 21273487A JP S6457180 A JPS6457180 A JP S6457180A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- lowering
- liquid nitrogen
- signal
- expanded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
PURPOSE:To prevent the lowering in the amplitude and rising/falling speed of a receiving signal, by using a superconductive material in the conductor of a power source probe and that of a signal probe and almost holding a conductor part at the temp. of liquid nitrogen. CONSTITUTION:An integrated circuit 10 to be measured is sucked to a specimen support stand 20 under vacuum and an arrangement pad 11 is connected so as to be matched with probe needles 103. The pad 11 is connected to the ceramic superconductive expanded layer wiring 101 laminated to a ceramic expanded substrate 100 through the needles 103 and led out to the outside from an expanded point by a coaxial cable 105. The wiring 101 is laminated through an insulating substance from above and below by an earth layer 102 due to the same material and the substrate 100 is almost held to the temp. of liquid nitrogen by liquid nitrogen 40. Therefore, the wiring 101 becomes a no-loss strip line and the lowering in the rising/falling speed of the signal waveform transmitting through said wiring is extremely small and the lowering in signal amplitude can be prevented.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62212734A JPS6457180A (en) | 1987-08-28 | 1987-08-28 | Test probe apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62212734A JPS6457180A (en) | 1987-08-28 | 1987-08-28 | Test probe apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6457180A true JPS6457180A (en) | 1989-03-03 |
Family
ID=16627550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62212734A Pending JPS6457180A (en) | 1987-08-28 | 1987-08-28 | Test probe apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6457180A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06163657A (en) * | 1992-11-27 | 1994-06-10 | Nec Corp | Probe card |
| CN102323525A (en) * | 2011-06-16 | 2012-01-18 | 中国电力科学研究院 | The above voltage withstand class lead wire insulation of a kind of 35kV performance test method of testing |
| CN105203807A (en) * | 2015-09-15 | 2015-12-30 | 京东方科技集团股份有限公司 | Electric inspection jig and electric inspection method |
-
1987
- 1987-08-28 JP JP62212734A patent/JPS6457180A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06163657A (en) * | 1992-11-27 | 1994-06-10 | Nec Corp | Probe card |
| CN102323525A (en) * | 2011-06-16 | 2012-01-18 | 中国电力科学研究院 | The above voltage withstand class lead wire insulation of a kind of 35kV performance test method of testing |
| CN102323525B (en) * | 2011-06-16 | 2015-04-29 | 中国电力科学研究院 | Test method for insulating property experiment on lead with withstand voltage level of more than 35kV |
| CN105203807A (en) * | 2015-09-15 | 2015-12-30 | 京东方科技集团股份有限公司 | Electric inspection jig and electric inspection method |
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