JPS6457110A - Measuring apparatus of linear motion - Google Patents

Measuring apparatus of linear motion

Info

Publication number
JPS6457110A
JPS6457110A JP21363587A JP21363587A JPS6457110A JP S6457110 A JPS6457110 A JP S6457110A JP 21363587 A JP21363587 A JP 21363587A JP 21363587 A JP21363587 A JP 21363587A JP S6457110 A JPS6457110 A JP S6457110A
Authority
JP
Japan
Prior art keywords
displacement
error
motion body
detects
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21363587A
Other languages
Japanese (ja)
Other versions
JPH0731054B2 (en
Inventor
Koji Takada
Kenji Magara
Minoru Nishiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Motor Wheel Co Ltd
Chuo Seiki KK
Original Assignee
Central Motor Wheel Co Ltd
Chuo Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Motor Wheel Co Ltd, Chuo Seiki KK filed Critical Central Motor Wheel Co Ltd
Priority to JP21363587A priority Critical patent/JPH0731054B2/en
Priority to US07/237,743 priority patent/US4847511A/en
Publication of JPS6457110A publication Critical patent/JPS6457110A/en
Publication of JPH0731054B2 publication Critical patent/JPH0731054B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To measure a factor of an error of four components with high precision, by correcting a factor of variation in a laser generator itself and by providing the respective optical path systems of displacement and angle detecting means separately. CONSTITUTION:A four-quadrant photosensor PS17 for correction detects the position of a light spot due to variation in a light source of a laser generator 12. PS22 for position detecting detects the displacement of a corner cube prism CQ3 for displacement detection provided in a linear motion body 1, which is magnified four times by reciprocating the same twice between the CQ and a displacement magnifying means 21. PS27 for angle detection detects the inclination of a reflector 4 provided in the motion body 1 from a reflected light therefrom which is obtained by projecting a light flux branched in the means 21 onto the reflector through an angle lead-out means 26. Outputs of these PS17, 22 and 27 are introduced into an arithmetic unit, wherein an error in each of horizontal and vertical directions (or an error in each of pitching and yawing) of the motion body 1 is determined from signals of PS17 and 22 (or 27) by an operation of a prescribed formula. Since the means 21 and 26 are provided on separate optical paths from each other, PS22 receives the displacement of the CQ3 magnified four times as it is, and thus a resolution of the apparatus is improved.
JP21363587A 1987-08-27 1987-08-27 Linear motion measuring device Expired - Fee Related JPH0731054B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP21363587A JPH0731054B2 (en) 1987-08-27 1987-08-27 Linear motion measuring device
US07/237,743 US4847511A (en) 1987-08-27 1988-08-29 Device for measuring rectilinear motion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21363587A JPH0731054B2 (en) 1987-08-27 1987-08-27 Linear motion measuring device

Publications (2)

Publication Number Publication Date
JPS6457110A true JPS6457110A (en) 1989-03-03
JPH0731054B2 JPH0731054B2 (en) 1995-04-10

Family

ID=16642416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21363587A Expired - Fee Related JPH0731054B2 (en) 1987-08-27 1987-08-27 Linear motion measuring device

Country Status (1)

Country Link
JP (1) JPH0731054B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06221853A (en) * 1993-01-25 1994-08-12 Agency Of Ind Science & Technol Position detector
JP2011117780A (en) * 2009-12-01 2011-06-16 Canon Inc Method of measuring perpendicularity

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06221853A (en) * 1993-01-25 1994-08-12 Agency Of Ind Science & Technol Position detector
JP2011117780A (en) * 2009-12-01 2011-06-16 Canon Inc Method of measuring perpendicularity

Also Published As

Publication number Publication date
JPH0731054B2 (en) 1995-04-10

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