JPS6457110A - Measuring apparatus of linear motion - Google Patents
Measuring apparatus of linear motionInfo
- Publication number
- JPS6457110A JPS6457110A JP21363587A JP21363587A JPS6457110A JP S6457110 A JPS6457110 A JP S6457110A JP 21363587 A JP21363587 A JP 21363587A JP 21363587 A JP21363587 A JP 21363587A JP S6457110 A JPS6457110 A JP S6457110A
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- error
- motion body
- detects
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE:To measure a factor of an error of four components with high precision, by correcting a factor of variation in a laser generator itself and by providing the respective optical path systems of displacement and angle detecting means separately. CONSTITUTION:A four-quadrant photosensor PS17 for correction detects the position of a light spot due to variation in a light source of a laser generator 12. PS22 for position detecting detects the displacement of a corner cube prism CQ3 for displacement detection provided in a linear motion body 1, which is magnified four times by reciprocating the same twice between the CQ and a displacement magnifying means 21. PS27 for angle detection detects the inclination of a reflector 4 provided in the motion body 1 from a reflected light therefrom which is obtained by projecting a light flux branched in the means 21 onto the reflector through an angle lead-out means 26. Outputs of these PS17, 22 and 27 are introduced into an arithmetic unit, wherein an error in each of horizontal and vertical directions (or an error in each of pitching and yawing) of the motion body 1 is determined from signals of PS17 and 22 (or 27) by an operation of a prescribed formula. Since the means 21 and 26 are provided on separate optical paths from each other, PS22 receives the displacement of the CQ3 magnified four times as it is, and thus a resolution of the apparatus is improved.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21363587A JPH0731054B2 (en) | 1987-08-27 | 1987-08-27 | Linear motion measuring device |
US07/237,743 US4847511A (en) | 1987-08-27 | 1988-08-29 | Device for measuring rectilinear motion |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21363587A JPH0731054B2 (en) | 1987-08-27 | 1987-08-27 | Linear motion measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6457110A true JPS6457110A (en) | 1989-03-03 |
JPH0731054B2 JPH0731054B2 (en) | 1995-04-10 |
Family
ID=16642416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21363587A Expired - Fee Related JPH0731054B2 (en) | 1987-08-27 | 1987-08-27 | Linear motion measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0731054B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06221853A (en) * | 1993-01-25 | 1994-08-12 | Agency Of Ind Science & Technol | Position detector |
JP2011117780A (en) * | 2009-12-01 | 2011-06-16 | Canon Inc | Method of measuring perpendicularity |
-
1987
- 1987-08-27 JP JP21363587A patent/JPH0731054B2/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06221853A (en) * | 1993-01-25 | 1994-08-12 | Agency Of Ind Science & Technol | Position detector |
JP2011117780A (en) * | 2009-12-01 | 2011-06-16 | Canon Inc | Method of measuring perpendicularity |
Also Published As
Publication number | Publication date |
---|---|
JPH0731054B2 (en) | 1995-04-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |