JPS645691U - - Google Patents
Info
- Publication number
- JPS645691U JPS645691U JP9937787U JP9937787U JPS645691U JP S645691 U JPS645691 U JP S645691U JP 9937787 U JP9937787 U JP 9937787U JP 9937787 U JP9937787 U JP 9937787U JP S645691 U JPS645691 U JP S645691U
- Authority
- JP
- Japan
- Prior art keywords
- air
- conveyor
- cleaning
- cleaned
- exhaust hood
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 8
- 239000002904 solvent Substances 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims 2
- 239000003599 detergent Substances 0.000 claims 1
Landscapes
- Ventilation (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9937787U JPS645691U (ko) | 1987-06-30 | 1987-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9937787U JPS645691U (ko) | 1987-06-30 | 1987-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS645691U true JPS645691U (ko) | 1989-01-12 |
Family
ID=31326480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9937787U Pending JPS645691U (ko) | 1987-06-30 | 1987-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS645691U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007027457A (ja) * | 2005-07-19 | 2007-02-01 | Matsushita Electric Ind Co Ltd | 基板クリーニング装置、及び基板搬送装置 |
-
1987
- 1987-06-30 JP JP9937787U patent/JPS645691U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007027457A (ja) * | 2005-07-19 | 2007-02-01 | Matsushita Electric Ind Co Ltd | 基板クリーニング装置、及び基板搬送装置 |
| JP4680704B2 (ja) * | 2005-07-19 | 2011-05-11 | パナソニック株式会社 | 基板クリーニング装置、及び基板搬送装置 |
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