JPS6455565A - Projecting exposure mask - Google Patents

Projecting exposure mask

Info

Publication number
JPS6455565A
JPS6455565A JP21252187A JP21252187A JPS6455565A JP S6455565 A JPS6455565 A JP S6455565A JP 21252187 A JP21252187 A JP 21252187A JP 21252187 A JP21252187 A JP 21252187A JP S6455565 A JPS6455565 A JP S6455565A
Authority
JP
Japan
Prior art keywords
adhesive
film
frame
exposure
exposure mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21252187A
Other languages
Japanese (ja)
Inventor
Yukimichi Kanedaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP21252187A priority Critical patent/JPS6455565A/en
Publication of JPS6455565A publication Critical patent/JPS6455565A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE:To prevent pattern defects due to deterioration in an adhesive, which is caused by exposure, by providing a transparent protecting film with an overhang part and fixing said film to a supporting frame with an adhesive through the overhand part. CONSTITUTION:The transparent protecting film 5 is directly pressed with pressure to the leading edge of the supporting frame 3 on the side where the patterns 2 of a transparent substrate 1 are formed. The the overhang part of the film 5 is bent toward the outer periphery of the frame 3, is fixed to the frame 3 with the adhesive 4a, and is taken for a projecting exposure mask. By using this constitution, the adhesive 4a is not exposed in a closed space 6, the occurrence of pattern defects due to deterioration in the adhesive which is caused by exposure, can be prevented.
JP21252187A 1987-08-26 1987-08-26 Projecting exposure mask Pending JPS6455565A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21252187A JPS6455565A (en) 1987-08-26 1987-08-26 Projecting exposure mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21252187A JPS6455565A (en) 1987-08-26 1987-08-26 Projecting exposure mask

Publications (1)

Publication Number Publication Date
JPS6455565A true JPS6455565A (en) 1989-03-02

Family

ID=16624047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21252187A Pending JPS6455565A (en) 1987-08-26 1987-08-26 Projecting exposure mask

Country Status (1)

Country Link
JP (1) JPS6455565A (en)

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