JPS6455565A - Projecting exposure mask - Google Patents
Projecting exposure maskInfo
- Publication number
- JPS6455565A JPS6455565A JP21252187A JP21252187A JPS6455565A JP S6455565 A JPS6455565 A JP S6455565A JP 21252187 A JP21252187 A JP 21252187A JP 21252187 A JP21252187 A JP 21252187A JP S6455565 A JPS6455565 A JP S6455565A
- Authority
- JP
- Japan
- Prior art keywords
- adhesive
- film
- frame
- exposure
- exposure mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
PURPOSE:To prevent pattern defects due to deterioration in an adhesive, which is caused by exposure, by providing a transparent protecting film with an overhang part and fixing said film to a supporting frame with an adhesive through the overhand part. CONSTITUTION:The transparent protecting film 5 is directly pressed with pressure to the leading edge of the supporting frame 3 on the side where the patterns 2 of a transparent substrate 1 are formed. The the overhang part of the film 5 is bent toward the outer periphery of the frame 3, is fixed to the frame 3 with the adhesive 4a, and is taken for a projecting exposure mask. By using this constitution, the adhesive 4a is not exposed in a closed space 6, the occurrence of pattern defects due to deterioration in the adhesive which is caused by exposure, can be prevented.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21252187A JPS6455565A (en) | 1987-08-26 | 1987-08-26 | Projecting exposure mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21252187A JPS6455565A (en) | 1987-08-26 | 1987-08-26 | Projecting exposure mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6455565A true JPS6455565A (en) | 1989-03-02 |
Family
ID=16624047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21252187A Pending JPS6455565A (en) | 1987-08-26 | 1987-08-26 | Projecting exposure mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6455565A (en) |
-
1987
- 1987-08-26 JP JP21252187A patent/JPS6455565A/en active Pending
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