JPS6454455A - Aligner - Google Patents

Aligner

Info

Publication number
JPS6454455A
JPS6454455A JP62210583A JP21058387A JPS6454455A JP S6454455 A JPS6454455 A JP S6454455A JP 62210583 A JP62210583 A JP 62210583A JP 21058387 A JP21058387 A JP 21058387A JP S6454455 A JPS6454455 A JP S6454455A
Authority
JP
Japan
Prior art keywords
substrate
exposure
light source
propagated
ultraviolet light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62210583A
Other languages
Japanese (ja)
Inventor
Hitoshi Arai
Isao Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62210583A priority Critical patent/JPS6454455A/en
Publication of JPS6454455A publication Critical patent/JPS6454455A/en
Pending legal-status Critical Current

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To remove the effect of heat to a mask film and to prevent the lowering of precision in exposure by propagating ultraviolet light emitted from a light source to a photosensitive resist film through an optical fiber and executing exposure. CONSTITUTION:A substrate 1 and the mask film 2 are housed in a printing frame 3 and the ultraviolet light emitted from the light source 7 is propagated with a bundle fiber 8 obtained by bundling many optical fibers. In such a case, the end part 10 of the bundle fiber is arrayed in a long shape and bound by a binding plate. Since the end part 10 is made to horizontally scan just above the substrate 1 the ultraviolet light propagated with the optical fibers are uniformly radiated on the substrate 1. Then, the pattern part of the specified circuit of the photosensitive resist film can be hardened. Namely, since the light source 7 is set apart from the substrate 1 the heat is not directly propagated into the printing frame and the mask film 2 is not contracted because of the rising of temperature in the printing frame. Thus, the lowering of the precision in exposure can be prevented.
JP62210583A 1987-08-25 1987-08-25 Aligner Pending JPS6454455A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62210583A JPS6454455A (en) 1987-08-25 1987-08-25 Aligner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62210583A JPS6454455A (en) 1987-08-25 1987-08-25 Aligner

Publications (1)

Publication Number Publication Date
JPS6454455A true JPS6454455A (en) 1989-03-01

Family

ID=16591719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62210583A Pending JPS6454455A (en) 1987-08-25 1987-08-25 Aligner

Country Status (1)

Country Link
JP (1) JPS6454455A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223358A (en) * 1988-07-12 1990-01-25 Fuji Photo Film Co Ltd Method and device for contact printing in photoengraving process
JPH03100852U (en) * 1990-02-02 1991-10-22
JP2004501518A (en) * 2000-06-21 2004-01-15 ラウノ　サルミ Method for individually marking the foundation

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223358A (en) * 1988-07-12 1990-01-25 Fuji Photo Film Co Ltd Method and device for contact printing in photoengraving process
JPH03100852U (en) * 1990-02-02 1991-10-22
JP2004501518A (en) * 2000-06-21 2004-01-15 ラウノ　サルミ Method for individually marking the foundation

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