JPS645442U - - Google Patents
Info
- Publication number
- JPS645442U JPS645442U JP9787887U JP9787887U JPS645442U JP S645442 U JPS645442 U JP S645442U JP 9787887 U JP9787887 U JP 9787887U JP 9787887 U JP9787887 U JP 9787887U JP S645442 U JPS645442 U JP S645442U
- Authority
- JP
- Japan
- Prior art keywords
- hook
- tank
- rotary table
- etching
- storage device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9787887U JPS645442U (enrdf_load_stackoverflow) | 1987-06-25 | 1987-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9787887U JPS645442U (enrdf_load_stackoverflow) | 1987-06-25 | 1987-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS645442U true JPS645442U (enrdf_load_stackoverflow) | 1989-01-12 |
Family
ID=31323654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9787887U Pending JPS645442U (enrdf_load_stackoverflow) | 1987-06-25 | 1987-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS645442U (enrdf_load_stackoverflow) |
-
1987
- 1987-06-25 JP JP9787887U patent/JPS645442U/ja active Pending
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