JPS645440U - - Google Patents
Info
- Publication number
- JPS645440U JPS645440U JP1987098461U JP9846187U JPS645440U JP S645440 U JPS645440 U JP S645440U JP 1987098461 U JP1987098461 U JP 1987098461U JP 9846187 U JP9846187 U JP 9846187U JP S645440 U JPS645440 U JP S645440U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- cleaning
- cleaning liquid
- end connected
- generating means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987098461U JPS645440U (en:Method) | 1987-06-29 | 1987-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987098461U JPS645440U (en:Method) | 1987-06-29 | 1987-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS645440U true JPS645440U (en:Method) | 1989-01-12 |
Family
ID=31324748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987098461U Pending JPS645440U (en:Method) | 1987-06-29 | 1987-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS645440U (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0629271A (ja) * | 1992-03-12 | 1994-02-04 | Kyushu Electron Metal Co Ltd | 半導体ウェーハの洗浄方法及びその装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6178124A (ja) * | 1984-09-26 | 1986-04-21 | Oki Electric Ind Co Ltd | 半導体ウエハの自動洗浄装置 |
| JPS62123738A (ja) * | 1985-11-25 | 1987-06-05 | Hitachi Ltd | ダイシング装置 |
-
1987
- 1987-06-29 JP JP1987098461U patent/JPS645440U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6178124A (ja) * | 1984-09-26 | 1986-04-21 | Oki Electric Ind Co Ltd | 半導体ウエハの自動洗浄装置 |
| JPS62123738A (ja) * | 1985-11-25 | 1987-06-05 | Hitachi Ltd | ダイシング装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0629271A (ja) * | 1992-03-12 | 1994-02-04 | Kyushu Electron Metal Co Ltd | 半導体ウェーハの洗浄方法及びその装置 |