JPS645440U - - Google Patents
Info
- Publication number
- JPS645440U JPS645440U JP1987098461U JP9846187U JPS645440U JP S645440 U JPS645440 U JP S645440U JP 1987098461 U JP1987098461 U JP 1987098461U JP 9846187 U JP9846187 U JP 9846187U JP S645440 U JPS645440 U JP S645440U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- cleaning
- cleaning liquid
- end connected
- generating means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第1図は本考案の一実施例を示す構成図、第2
図は洗浄装置の従来例を示す構成図、第3図は気
泡発生器の斜視図である。
1……洗浄装置、2……被洗浄物、3……タン
ク、4……洗浄液、5……ポンプ、6……洗浄液
供給用配管、7……洗浄槽、8……ノズル、10
……気泡発生器、11……気体送給用配管、14
……洗浄液排出用配管、16,17,18,19
……制御弁、30……PHセンサ、31……制御部
。
Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure is a configuration diagram showing a conventional example of a cleaning device, and FIG. 3 is a perspective view of a bubble generator. DESCRIPTION OF SYMBOLS 1...Cleaning device, 2...Object to be cleaned, 3...Tank, 4...Cleaning liquid, 5...Pump, 6...Cleaning liquid supply piping, 7...Cleaning tank, 8...Nozzle, 10
... Bubble generator, 11 ... Gas supply piping, 14
...Cleaning liquid discharge piping, 16, 17, 18, 19
... Control valve, 30 ... PH sensor, 31 ... Control section.
Claims (1)
前記タンクに接続され途中にポンプおよび制御弁
が設けられ他端には前記タンクより送られてくる
洗浄液を前記洗浄槽内の被洗浄物に向けて噴射す
る手段が取付けられた洗浄液供給用配管と、制御
弁を有して一端が前記洗浄槽に接続された洗浄液
排出用配管と、前記洗浄槽内に配設された気泡発
生手段と、制御弁を有して一端が前記気泡発生手
段に接続された気体送給用配管と、前記洗浄槽内
の洗浄液のPH値を測定するPHセンサと、この
PHセンサによる検出信号にもとずいて前記各配
管の制御弁を開閉制御する制御部とを備えたこと
を特徴とする洗浄装置。 A tank for storing cleaning liquid, a cleaning tank, one end connected to the tank, a pump and a control valve provided in the middle, and the other end directing the cleaning liquid sent from the tank to the object to be cleaned in the cleaning tank. a cleaning liquid supply pipe equipped with a means for injecting the cleaning liquid; a cleaning liquid discharge pipe having a control valve and one end connected to the cleaning tank; a bubble generating means disposed in the cleaning tank; a gas supply pipe having a valve and one end connected to the bubble generating means; a PH sensor for measuring the PH value of the cleaning liquid in the cleaning tank; A cleaning device characterized by comprising a control section that controls opening and closing of control valves of each pipe.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987098461U JPS645440U (en) | 1987-06-29 | 1987-06-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987098461U JPS645440U (en) | 1987-06-29 | 1987-06-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS645440U true JPS645440U (en) | 1989-01-12 |
Family
ID=31324748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987098461U Pending JPS645440U (en) | 1987-06-29 | 1987-06-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS645440U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0629271A (en) * | 1992-03-12 | 1994-02-04 | Kyushu Electron Metal Co Ltd | Method of washing semiconductor wafer and its device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6178124A (en) * | 1984-09-26 | 1986-04-21 | Oki Electric Ind Co Ltd | Automatic cleaner for semiconductor wafer |
JPS62123738A (en) * | 1985-11-25 | 1987-06-05 | Hitachi Ltd | Dicing equipment |
-
1987
- 1987-06-29 JP JP1987098461U patent/JPS645440U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6178124A (en) * | 1984-09-26 | 1986-04-21 | Oki Electric Ind Co Ltd | Automatic cleaner for semiconductor wafer |
JPS62123738A (en) * | 1985-11-25 | 1987-06-05 | Hitachi Ltd | Dicing equipment |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0629271A (en) * | 1992-03-12 | 1994-02-04 | Kyushu Electron Metal Co Ltd | Method of washing semiconductor wafer and its device |