JPS645433U - - Google Patents

Info

Publication number
JPS645433U
JPS645433U JP10056187U JP10056187U JPS645433U JP S645433 U JPS645433 U JP S645433U JP 10056187 U JP10056187 U JP 10056187U JP 10056187 U JP10056187 U JP 10056187U JP S645433 U JPS645433 U JP S645433U
Authority
JP
Japan
Prior art keywords
pattern
reticle
optical system
light source
supports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10056187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10056187U priority Critical patent/JPS645433U/ja
Publication of JPS645433U publication Critical patent/JPS645433U/ja
Pending legal-status Critical Current

Links

JP10056187U 1987-06-29 1987-06-29 Pending JPS645433U (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10056187U JPS645433U (US20100268047A1-20101021-C00003.png) 1987-06-29 1987-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10056187U JPS645433U (US20100268047A1-20101021-C00003.png) 1987-06-29 1987-06-29

Publications (1)

Publication Number Publication Date
JPS645433U true JPS645433U (US20100268047A1-20101021-C00003.png) 1989-01-12

Family

ID=31328746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10056187U Pending JPS645433U (US20100268047A1-20101021-C00003.png) 1987-06-29 1987-06-29

Country Status (1)

Country Link
JP (1) JPS645433U (US20100268047A1-20101021-C00003.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6128312A (ja) * 1984-07-20 1986-02-08 ヤンマー農機株式会社 田植機
JPS6214428A (ja) * 1985-07-12 1987-01-23 Nec Corp 縮小投影型露光方法
JPS62105130A (ja) * 1985-10-31 1987-05-15 Nec Corp 複写機

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6128312A (ja) * 1984-07-20 1986-02-08 ヤンマー農機株式会社 田植機
JPS6214428A (ja) * 1985-07-12 1987-01-23 Nec Corp 縮小投影型露光方法
JPS62105130A (ja) * 1985-10-31 1987-05-15 Nec Corp 複写機

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