JPS6454044U - - Google Patents

Info

Publication number
JPS6454044U
JPS6454044U JP1987149924U JP14992487U JPS6454044U JP S6454044 U JPS6454044 U JP S6454044U JP 1987149924 U JP1987149924 U JP 1987149924U JP 14992487 U JP14992487 U JP 14992487U JP S6454044 U JPS6454044 U JP S6454044U
Authority
JP
Japan
Prior art keywords
pellicle
substrate
pellicle frame
protrusion
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987149924U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987149924U priority Critical patent/JPS6454044U/ja
Publication of JPS6454044U publication Critical patent/JPS6454044U/ja
Pending legal-status Critical Current

Links

JP1987149924U 1987-09-30 1987-09-30 Pending JPS6454044U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987149924U JPS6454044U (US20090163788A1-20090625-C00002.png) 1987-09-30 1987-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987149924U JPS6454044U (US20090163788A1-20090625-C00002.png) 1987-09-30 1987-09-30

Publications (1)

Publication Number Publication Date
JPS6454044U true JPS6454044U (US20090163788A1-20090625-C00002.png) 1989-04-04

Family

ID=31422599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987149924U Pending JPS6454044U (US20090163788A1-20090625-C00002.png) 1987-09-30 1987-09-30

Country Status (1)

Country Link
JP (1) JPS6454044U (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011075662A (ja) * 2009-09-29 2011-04-14 Toppan Printing Co Ltd ペリクル、フォトマスク、および半導体デバイス

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6118956A (ja) * 1984-07-05 1986-01-27 Nippon Kogaku Kk <Nikon> マスク保護装置
JPS6250758A (ja) * 1985-08-29 1987-03-05 Fujitsu Ltd パタ−ン形成方法
JPS6258455B2 (US20090163788A1-20090625-C00002.png) * 1981-12-11 1987-12-05 Nippon Electron Optics Lab

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258455B2 (US20090163788A1-20090625-C00002.png) * 1981-12-11 1987-12-05 Nippon Electron Optics Lab
JPS6118956A (ja) * 1984-07-05 1986-01-27 Nippon Kogaku Kk <Nikon> マスク保護装置
JPS6250758A (ja) * 1985-08-29 1987-03-05 Fujitsu Ltd パタ−ン形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011075662A (ja) * 2009-09-29 2011-04-14 Toppan Printing Co Ltd ペリクル、フォトマスク、および半導体デバイス

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