JPS645355Y2 - - Google Patents
Info
- Publication number
- JPS645355Y2 JPS645355Y2 JP7796681U JP7796681U JPS645355Y2 JP S645355 Y2 JPS645355 Y2 JP S645355Y2 JP 7796681 U JP7796681 U JP 7796681U JP 7796681 U JP7796681 U JP 7796681U JP S645355 Y2 JPS645355 Y2 JP S645355Y2
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- atmospheric gas
- spheroidal
- spheroidal mirror
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 24
- 230000005855 radiation Effects 0.000 claims description 16
- 239000011521 glass Substances 0.000 claims description 13
- 238000007599 discharging Methods 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 58
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 58
- 239000007789 gas Substances 0.000 description 46
- 239000013078 crystal Substances 0.000 description 33
- 229910052736 halogen Inorganic materials 0.000 description 15
- 150000002367 halogens Chemical class 0.000 description 15
- 239000000463 material Substances 0.000 description 13
- 231100000331 toxic Toxicity 0.000 description 11
- 230000002588 toxic effect Effects 0.000 description 11
- 230000008018 melting Effects 0.000 description 10
- 238000002844 melting Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 230000006378 damage Effects 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 239000012634 fragment Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001304 sample melting Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Control Of Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7796681U JPS645355Y2 (enEXAMPLES) | 1981-05-28 | 1981-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7796681U JPS645355Y2 (enEXAMPLES) | 1981-05-28 | 1981-05-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57188876U JPS57188876U (enEXAMPLES) | 1982-11-30 |
| JPS645355Y2 true JPS645355Y2 (enEXAMPLES) | 1989-02-09 |
Family
ID=29873607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7796681U Expired JPS645355Y2 (enEXAMPLES) | 1981-05-28 | 1981-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS645355Y2 (enEXAMPLES) |
-
1981
- 1981-05-28 JP JP7796681U patent/JPS645355Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57188876U (enEXAMPLES) | 1982-11-30 |
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