JPS6452601A - Ozonizer - Google Patents

Abstract

PURPOSE:To efficiently generate ozone useful in the field of semiconductor industry without deteriorating electrodes, by containing specific ceramics in one or more electrodes of an ozonizer having a structure in the form of a concentric unit consisting of two electrodes. CONSTITUTION:An outside cylindrical ceramics electrode 1 having <=30cm length and an outer shape of circular cross section of <=20mm is prepared from a sintered electric conductive ceramics compact, containing >=30vol.% one or more of borides, carbides and nitrides (e.g. TaB2, TiC or NbC) of a group IVa or Va transition metal and having >=10<3>OMEGA<-1>cm<-1> electric conductivity at 20 deg.C. An inside ceramics electrode 2 having the outside consisting of a dielectric 3, such as Al2O3, and a core consisting of electrically conductive ceramics, such as sintered compact of ZrB2, is provided in the form of a concentric unit with a spatial part 4 placed in the above-mentioned electrode 1 to afford an ozonizer. O2 is then fed to the spatial part 4 of the ozonizer and a high voltage is applied across both electrodes 1 and 2 to carry out reaction generate and afford ozone in about 10,000ppm concentration.