JPS6452594U - - Google Patents
Info
- Publication number
- JPS6452594U JPS6452594U JP14799587U JP14799587U JPS6452594U JP S6452594 U JPS6452594 U JP S6452594U JP 14799587 U JP14799587 U JP 14799587U JP 14799587 U JP14799587 U JP 14799587U JP S6452594 U JPS6452594 U JP S6452594U
- Authority
- JP
- Japan
- Prior art keywords
- belt
- roller
- wafer
- cleaning liquid
- support surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14799587U JPS6452594U (enExample) | 1987-09-28 | 1987-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14799587U JPS6452594U (enExample) | 1987-09-28 | 1987-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6452594U true JPS6452594U (enExample) | 1989-03-31 |
Family
ID=31418909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14799587U Pending JPS6452594U (enExample) | 1987-09-28 | 1987-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6452594U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010275026A (ja) * | 2009-05-26 | 2010-12-09 | Toppan Printing Co Ltd | 枚葉基板搬送装置 |
-
1987
- 1987-09-28 JP JP14799587U patent/JPS6452594U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010275026A (ja) * | 2009-05-26 | 2010-12-09 | Toppan Printing Co Ltd | 枚葉基板搬送装置 |