JPS6452243U - - Google Patents
Info
- Publication number
- JPS6452243U JPS6452243U JP14635787U JP14635787U JPS6452243U JP S6452243 U JPS6452243 U JP S6452243U JP 14635787 U JP14635787 U JP 14635787U JP 14635787 U JP14635787 U JP 14635787U JP S6452243 U JPS6452243 U JP S6452243U
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- fuse element
- film
- cut
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 2
- 239000011229 interlayer Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Weting (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14635787U JPS6452243U (un) | 1987-09-28 | 1987-09-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14635787U JPS6452243U (un) | 1987-09-28 | 1987-09-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6452243U true JPS6452243U (un) | 1989-03-31 |
Family
ID=31415767
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14635787U Pending JPS6452243U (un) | 1987-09-28 | 1987-09-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6452243U (un) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58190055A (ja) * | 1982-04-29 | 1983-11-05 | Sharp Corp | 半導体装置及びその製造方法 |
JPS6267834A (ja) * | 1985-09-20 | 1987-03-27 | Hitachi Ltd | レ−ザ処理方法 |
JPS6480038A (en) * | 1987-09-19 | 1989-03-24 | Hitachi Ltd | Manufacture of semiconductor integrated circuit device |
-
1987
- 1987-09-28 JP JP14635787U patent/JPS6452243U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58190055A (ja) * | 1982-04-29 | 1983-11-05 | Sharp Corp | 半導体装置及びその製造方法 |
JPS6267834A (ja) * | 1985-09-20 | 1987-03-27 | Hitachi Ltd | レ−ザ処理方法 |
JPS6480038A (en) * | 1987-09-19 | 1989-03-24 | Hitachi Ltd | Manufacture of semiconductor integrated circuit device |
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