JPS6452232U - - Google Patents

Info

Publication number
JPS6452232U
JPS6452232U JP14882987U JP14882987U JPS6452232U JP S6452232 U JPS6452232 U JP S6452232U JP 14882987 U JP14882987 U JP 14882987U JP 14882987 U JP14882987 U JP 14882987U JP S6452232 U JPS6452232 U JP S6452232U
Authority
JP
Japan
Prior art keywords
processing chamber
sample stage
mist
spraying
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14882987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452989Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987148829U priority Critical patent/JPH0452989Y2/ja
Publication of JPS6452232U publication Critical patent/JPS6452232U/ja
Application granted granted Critical
Publication of JPH0452989Y2 publication Critical patent/JPH0452989Y2/ja
Expired legal-status Critical Current

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  • Weting (AREA)
JP1987148829U 1987-09-29 1987-09-29 Expired JPH0452989Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987148829U JPH0452989Y2 (enrdf_load_stackoverflow) 1987-09-29 1987-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987148829U JPH0452989Y2 (enrdf_load_stackoverflow) 1987-09-29 1987-09-29

Publications (2)

Publication Number Publication Date
JPS6452232U true JPS6452232U (enrdf_load_stackoverflow) 1989-03-31
JPH0452989Y2 JPH0452989Y2 (enrdf_load_stackoverflow) 1992-12-14

Family

ID=31420507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987148829U Expired JPH0452989Y2 (enrdf_load_stackoverflow) 1987-09-29 1987-09-29

Country Status (1)

Country Link
JP (1) JPH0452989Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57152129A (en) * 1981-03-13 1982-09-20 Sanyo Electric Co Ltd Developing method of resist
JPS57204039A (en) * 1981-06-10 1982-12-14 Fujitsu Ltd Spray developing method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57152129A (en) * 1981-03-13 1982-09-20 Sanyo Electric Co Ltd Developing method of resist
JPS57204039A (en) * 1981-06-10 1982-12-14 Fujitsu Ltd Spray developing method

Also Published As

Publication number Publication date
JPH0452989Y2 (enrdf_load_stackoverflow) 1992-12-14

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