JPS6452232U - - Google Patents
Info
- Publication number
- JPS6452232U JPS6452232U JP14882987U JP14882987U JPS6452232U JP S6452232 U JPS6452232 U JP S6452232U JP 14882987 U JP14882987 U JP 14882987U JP 14882987 U JP14882987 U JP 14882987U JP S6452232 U JPS6452232 U JP S6452232U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- sample stage
- mist
- spraying
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 3
- 239000003595 mist Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987148829U JPH0452989Y2 (OSRAM) | 1987-09-29 | 1987-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987148829U JPH0452989Y2 (OSRAM) | 1987-09-29 | 1987-09-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6452232U true JPS6452232U (OSRAM) | 1989-03-31 |
| JPH0452989Y2 JPH0452989Y2 (OSRAM) | 1992-12-14 |
Family
ID=31420507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987148829U Expired JPH0452989Y2 (OSRAM) | 1987-09-29 | 1987-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452989Y2 (OSRAM) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57152129A (en) * | 1981-03-13 | 1982-09-20 | Sanyo Electric Co Ltd | Developing method of resist |
| JPS57204039A (en) * | 1981-06-10 | 1982-12-14 | Fujitsu Ltd | Spray developing method |
-
1987
- 1987-09-29 JP JP1987148829U patent/JPH0452989Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57152129A (en) * | 1981-03-13 | 1982-09-20 | Sanyo Electric Co Ltd | Developing method of resist |
| JPS57204039A (en) * | 1981-06-10 | 1982-12-14 | Fujitsu Ltd | Spray developing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0452989Y2 (OSRAM) | 1992-12-14 |