JPS645138U - - Google Patents
Info
- Publication number
- JPS645138U JPS645138U JP9959787U JP9959787U JPS645138U JP S645138 U JPS645138 U JP S645138U JP 9959787 U JP9959787 U JP 9959787U JP 9959787 U JP9959787 U JP 9959787U JP S645138 U JPS645138 U JP S645138U
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- transducer
- insulating substrate
- electrodes
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987099597U JP2514067Y2 (ja) | 1987-06-29 | 1987-06-29 | セラミック製トランスデュ−サ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987099597U JP2514067Y2 (ja) | 1987-06-29 | 1987-06-29 | セラミック製トランスデュ−サ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS645138U true JPS645138U (ru) | 1989-01-12 |
| JP2514067Y2 JP2514067Y2 (ja) | 1996-10-16 |
Family
ID=31326903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987099597U Expired - Lifetime JP2514067Y2 (ja) | 1987-06-29 | 1987-06-29 | セラミック製トランスデュ−サ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2514067Y2 (ru) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11337435A (ja) * | 1998-04-27 | 1999-12-10 | Texas Instr Inc <Ti> | 出力誤差の少ない容量性圧力トランスジュ―サ |
| JP2002350263A (ja) * | 2001-05-22 | 2002-12-04 | Kyocera Corp | 圧力検出装置用パッケージ |
| JP2003207407A (ja) * | 2002-01-15 | 2003-07-25 | Texas Instr Japan Ltd | 圧力センサパッケージ及びその製造方法 |
| JP2010008115A (ja) * | 2008-06-25 | 2010-01-14 | Kyocera Corp | 圧力検出装置用基体および圧力検出装置 |
| JP2012073141A (ja) * | 2010-09-29 | 2012-04-12 | Kyocera Corp | 圧力検出用パッケージおよび圧力検出装置 |
| JP2018072031A (ja) * | 2016-10-25 | 2018-05-10 | 島根県 | 静電容量型センサ |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7415886B2 (en) * | 2005-12-20 | 2008-08-26 | Rosemount Inc. | Pressure sensor with deflectable diaphragm |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58160831A (ja) * | 1982-03-17 | 1983-09-24 | Matsushita Electric Ind Co Ltd | 静電容量型圧力センサ |
| JPS6029629A (ja) * | 1983-07-27 | 1985-02-15 | Yokogawa Hokushin Electric Corp | 半導体容量形圧力センサ |
| JPS6031032A (ja) * | 1983-07-29 | 1985-02-16 | Yokogawa Hokushin Electric Corp | 半導体容量形圧力センサ |
| JPS61155831A (ja) * | 1984-12-28 | 1986-07-15 | Yokogawa Electric Corp | 半導体容量形圧力センサ |
-
1987
- 1987-06-29 JP JP1987099597U patent/JP2514067Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58160831A (ja) * | 1982-03-17 | 1983-09-24 | Matsushita Electric Ind Co Ltd | 静電容量型圧力センサ |
| JPS6029629A (ja) * | 1983-07-27 | 1985-02-15 | Yokogawa Hokushin Electric Corp | 半導体容量形圧力センサ |
| JPS6031032A (ja) * | 1983-07-29 | 1985-02-16 | Yokogawa Hokushin Electric Corp | 半導体容量形圧力センサ |
| JPS61155831A (ja) * | 1984-12-28 | 1986-07-15 | Yokogawa Electric Corp | 半導体容量形圧力センサ |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11337435A (ja) * | 1998-04-27 | 1999-12-10 | Texas Instr Inc <Ti> | 出力誤差の少ない容量性圧力トランスジュ―サ |
| JP2002350263A (ja) * | 2001-05-22 | 2002-12-04 | Kyocera Corp | 圧力検出装置用パッケージ |
| JP2003207407A (ja) * | 2002-01-15 | 2003-07-25 | Texas Instr Japan Ltd | 圧力センサパッケージ及びその製造方法 |
| JP2010008115A (ja) * | 2008-06-25 | 2010-01-14 | Kyocera Corp | 圧力検出装置用基体および圧力検出装置 |
| JP2012073141A (ja) * | 2010-09-29 | 2012-04-12 | Kyocera Corp | 圧力検出用パッケージおよび圧力検出装置 |
| JP2018072031A (ja) * | 2016-10-25 | 2018-05-10 | 島根県 | 静電容量型センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2514067Y2 (ja) | 1996-10-16 |