JPS6450496A - Hybrid substrate - Google Patents

Hybrid substrate

Info

Publication number
JPS6450496A
JPS6450496A JP20680887A JP20680887A JPS6450496A JP S6450496 A JPS6450496 A JP S6450496A JP 20680887 A JP20680887 A JP 20680887A JP 20680887 A JP20680887 A JP 20680887A JP S6450496 A JPS6450496 A JP S6450496A
Authority
JP
Japan
Prior art keywords
substrate
grain size
polycrystal
thermal conductivity
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20680887A
Other languages
Japanese (ja)
Other versions
JP2559757B2 (en
Inventor
Hiroyuki Tokunaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62206808A priority Critical patent/JP2559757B2/en
Priority to EP88307734A priority patent/EP0304337B1/en
Priority to DE3851735T priority patent/DE3851735T2/en
Priority to AU21460/88A priority patent/AU621831B2/en
Publication of JPS6450496A publication Critical patent/JPS6450496A/en
Priority to US07/742,189 priority patent/US5134018A/en
Priority to US07/884,178 priority patent/US5232766A/en
Application granted granted Critical
Publication of JP2559757B2 publication Critical patent/JP2559757B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Thin Film Transistor (AREA)
  • Recrystallisation Techniques (AREA)

Abstract

PURPOSE:To flatten the surface and thermal conductivity of a substrate by varying the grain size of the polycrystal of different type of material from that of the substrate deposited on a ceramic substrate in the thickness direction of the substrate, and forming two or more polycrystalline layers. CONSTITUTION:The polycrystal of a lowermost layer 1 formed on a ceramic substrate 1 has small grain size of 0.5mum or less, and voids of the surface of the ceramic substrate are buried and the distortion due to the difference of linear expansion coefficients of different types of materials are alleviated. A second layer 3 has grain size or 2mum or more with less grain boundaries to hold high thermal conductivity. A third layer 4 has small grain size of 0.5mum to improve the flatness of the substrate surface. Thus, since a hybrid substrate varies the grain sizes of the polycrystal in the direction of the thickness of film, its surface is flat and its thermal conductivity is improved.
JP62206808A 1987-08-20 1987-08-20 Hybrid board Expired - Fee Related JP2559757B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP62206808A JP2559757B2 (en) 1987-08-20 1987-08-20 Hybrid board
EP88307734A EP0304337B1 (en) 1987-08-20 1988-08-19 Hybrid substrate
DE3851735T DE3851735T2 (en) 1987-08-20 1988-08-19 Hybrid substrate.
AU21460/88A AU621831B2 (en) 1987-08-20 1988-08-22 Ceramic base substrate wiyh a deposited multi-layer structure of a different material
US07/742,189 US5134018A (en) 1987-08-20 1991-08-02 Hybrid substrate
US07/884,178 US5232766A (en) 1987-08-20 1992-05-18 Hybrid substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62206808A JP2559757B2 (en) 1987-08-20 1987-08-20 Hybrid board

Publications (2)

Publication Number Publication Date
JPS6450496A true JPS6450496A (en) 1989-02-27
JP2559757B2 JP2559757B2 (en) 1996-12-04

Family

ID=16529431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62206808A Expired - Fee Related JP2559757B2 (en) 1987-08-20 1987-08-20 Hybrid board

Country Status (1)

Country Link
JP (1) JP2559757B2 (en)

Also Published As

Publication number Publication date
JP2559757B2 (en) 1996-12-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees