JPS6450391A - Manufacture of thin film el panel - Google Patents
Manufacture of thin film el panelInfo
- Publication number
- JPS6450391A JPS6450391A JP62207195A JP20719587A JPS6450391A JP S6450391 A JPS6450391 A JP S6450391A JP 62207195 A JP62207195 A JP 62207195A JP 20719587 A JP20719587 A JP 20719587A JP S6450391 A JPS6450391 A JP S6450391A
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- sputtering
- substrate
- layer
- luminous layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
- 238000004544 sputter deposition Methods 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 229910044991 metal oxide Inorganic materials 0.000 abstract 2
- 238000007738 vacuum evaporation Methods 0.000 abstract 2
- 229910052786 argon Inorganic materials 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 238000005245 sintering Methods 0.000 abstract 1
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
PURPOSE:To improve the adhesion of a luminous layer and an insulating layer under the luminous layer by sputtering inversely in the oxygen-short atmosphere an insulating layer which is formed by sputtering a metallic oxide on a light- transparent substrate, to make the surface coarse, and forming a luminous layer in a two-dimension vacuum evaporation of a resistance wire heating system by using the above insulating layer as the foundation. CONSTITUTION:In the lower space of a chamber 20, a target 21 which is made by sintering the powder of a metallic oxide is arranged, and in the upper space, a substrate 1 on which a transparent electrode has been formed is furnished with the transparent electrode side facing the target 21. Then, the inside of the chamber 20 is set to be the argon and oxygen atmosphere, and an insulating layer 23 (first insulating layer) is formed on the substrate 1 by a sputtering. After the sputtering, an inverse sputtering is carried out by turning the polarity. A coarse surface is formed on the surface 23a of the first insulating layer 23 consequently. After that, a luminous layer 4 is formed over the first insulating layer 2 on the substrate 1 in a two-dimension vacuum evaporation in a resistance wire heating system. Furthermore, the second insulating layer 5 and a rear side electrode 6 are formed laminating on the luminous layer 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62207195A JPS6450391A (en) | 1987-08-19 | 1987-08-19 | Manufacture of thin film el panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62207195A JPS6450391A (en) | 1987-08-19 | 1987-08-19 | Manufacture of thin film el panel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6450391A true JPS6450391A (en) | 1989-02-27 |
Family
ID=16535816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62207195A Pending JPS6450391A (en) | 1987-08-19 | 1987-08-19 | Manufacture of thin film el panel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6450391A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003041453A1 (en) * | 2001-11-05 | 2003-05-15 | Neoview Co., Ltd. | Inorganic material evaporation apparatus |
-
1987
- 1987-08-19 JP JP62207195A patent/JPS6450391A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003041453A1 (en) * | 2001-11-05 | 2003-05-15 | Neoview Co., Ltd. | Inorganic material evaporation apparatus |
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