JPS6450212A - Production of thin film magnetic head - Google Patents

Production of thin film magnetic head

Info

Publication number
JPS6450212A
JPS6450212A JP20634187A JP20634187A JPS6450212A JP S6450212 A JPS6450212 A JP S6450212A JP 20634187 A JP20634187 A JP 20634187A JP 20634187 A JP20634187 A JP 20634187A JP S6450212 A JPS6450212 A JP S6450212A
Authority
JP
Japan
Prior art keywords
thin film
ceramics substrate
carbon
magnetic head
al2o3
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20634187A
Other languages
Japanese (ja)
Inventor
Shinsuke Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP20634187A priority Critical patent/JPS6450212A/en
Publication of JPS6450212A publication Critical patent/JPS6450212A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To obviate the generation of a problem in a thin film part even when said part is subjected to a heat cycle by subjecting a ceramics substrate contg. carbon to an oxidation treatment prior to the formation of an Al2O3 film on the ceramics substrate. CONSTITUTION:The ceramics substrate contg. carbon is subjected to the oxidation treatment before the Al2O3 film is formed by a sputtering method on the ceramics substrate. Since the free carbon on the surface of the ceramics substrate is oxidized and removed by this oxidation treatment, the problems of the partial change in the properties of the Al2O3 film and the generation of carbon dioxide by the successive diffusion of the free carbon in amorphous Al2O3 by heating and the consequent reaction are prevented. The thin film part of a thin film magnetic head is thus kept defect-free even if said part is subjected to the heat cycle and, therefore, the magnetic head is stably produced regardless of the kinds of the substrates.
JP20634187A 1987-08-21 1987-08-21 Production of thin film magnetic head Pending JPS6450212A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20634187A JPS6450212A (en) 1987-08-21 1987-08-21 Production of thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20634187A JPS6450212A (en) 1987-08-21 1987-08-21 Production of thin film magnetic head

Publications (1)

Publication Number Publication Date
JPS6450212A true JPS6450212A (en) 1989-02-27

Family

ID=16521695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20634187A Pending JPS6450212A (en) 1987-08-21 1987-08-21 Production of thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS6450212A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160001463U (en) * 2014-10-27 2016-05-09 (주)한국나노텍 Hanger automatic rotation device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160001463U (en) * 2014-10-27 2016-05-09 (주)한국나노텍 Hanger automatic rotation device

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