JPS6449662A - Hybrid substrate - Google Patents
Hybrid substrateInfo
- Publication number
- JPS6449662A JPS6449662A JP62206807A JP20680787A JPS6449662A JP S6449662 A JPS6449662 A JP S6449662A JP 62206807 A JP62206807 A JP 62206807A JP 20680787 A JP20680787 A JP 20680787A JP S6449662 A JPS6449662 A JP S6449662A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- alumina
- evenness
- polysilicon
- unevenness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Electronic Switches (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62206807A JP2760988B2 (ja) | 1987-08-20 | 1987-08-20 | ハイブリッド基板 |
EP88307734A EP0304337B1 (en) | 1987-08-20 | 1988-08-19 | Hybrid substrate |
DE3851735T DE3851735T2 (de) | 1987-08-20 | 1988-08-19 | Hybrid-Substrat. |
AU21460/88A AU621831B2 (en) | 1987-08-20 | 1988-08-22 | Ceramic base substrate wiyh a deposited multi-layer structure of a different material |
US07/742,189 US5134018A (en) | 1987-08-20 | 1991-08-02 | Hybrid substrate |
US07/884,178 US5232766A (en) | 1987-08-20 | 1992-05-18 | Hybrid substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62206807A JP2760988B2 (ja) | 1987-08-20 | 1987-08-20 | ハイブリッド基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6449662A true JPS6449662A (en) | 1989-02-27 |
JP2760988B2 JP2760988B2 (ja) | 1998-06-04 |
Family
ID=16529416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62206807A Expired - Fee Related JP2760988B2 (ja) | 1987-08-20 | 1987-08-20 | ハイブリッド基板 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2760988B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1314563A2 (en) | 2001-11-27 | 2003-05-28 | Canon Kabushiki Kaisha | Ink-jet head, and method for manufacturing the same |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5599793A (en) * | 1979-01-25 | 1980-07-30 | Nippon Electric Co | Method of forming thick film |
JPS61211057A (ja) * | 1985-03-18 | 1986-09-19 | Toshiba Corp | サ−マルヘツド |
JPS62203325A (ja) * | 1986-03-04 | 1987-09-08 | Matsushita Electric Ind Co Ltd | 半導体用基板とその製造方法 |
-
1987
- 1987-08-20 JP JP62206807A patent/JP2760988B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5599793A (en) * | 1979-01-25 | 1980-07-30 | Nippon Electric Co | Method of forming thick film |
JPS61211057A (ja) * | 1985-03-18 | 1986-09-19 | Toshiba Corp | サ−マルヘツド |
JPS62203325A (ja) * | 1986-03-04 | 1987-09-08 | Matsushita Electric Ind Co Ltd | 半導体用基板とその製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1314563A2 (en) | 2001-11-27 | 2003-05-28 | Canon Kabushiki Kaisha | Ink-jet head, and method for manufacturing the same |
US6908563B2 (en) | 2001-11-27 | 2005-06-21 | Canon Kabushiki Kaisha | Ink-jet head, and method for manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
JP2760988B2 (ja) | 1998-06-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |