JPS64491A - Fine positioning mechanism - Google Patents
Fine positioning mechanismInfo
- Publication number
- JPS64491A JPS64491A JP62127414A JP12741487A JPS64491A JP S64491 A JPS64491 A JP S64491A JP 62127414 A JP62127414 A JP 62127414A JP 12741487 A JP12741487 A JP 12741487A JP S64491 A JPS64491 A JP S64491A
- Authority
- JP
- Japan
- Prior art keywords
- element body
- piezoelectric element
- moving mechanism
- detecting probe
- fine moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62-127414A JPH01491A (ja) | 1987-05-25 | 微小位置決め機構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62-127414A JPH01491A (ja) | 1987-05-25 | 微小位置決め機構 |
Publications (3)
Publication Number | Publication Date |
---|---|
JPS64491A true JPS64491A (en) | 1989-01-05 |
JPH01491A JPH01491A (ja) | 1989-01-05 |
JPH0421153B2 JPH0421153B2 (ja) | 1992-04-08 |
Family
ID=
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01231337A (ja) * | 1988-03-11 | 1989-09-14 | Tokyo Electron Ltd | プローブカード |
US5705078A (en) * | 1996-08-23 | 1998-01-06 | Uop | Oxidative removal of aqueous cyanide by manganese(IV)-containing oxides |
US7441445B2 (en) * | 2004-10-20 | 2008-10-28 | Sii Nanotechnology Inc. | Surface information measuring apparatus and surface information measuring method |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01231337A (ja) * | 1988-03-11 | 1989-09-14 | Tokyo Electron Ltd | プローブカード |
US5705078A (en) * | 1996-08-23 | 1998-01-06 | Uop | Oxidative removal of aqueous cyanide by manganese(IV)-containing oxides |
US7441445B2 (en) * | 2004-10-20 | 2008-10-28 | Sii Nanotechnology Inc. | Surface information measuring apparatus and surface information measuring method |
Also Published As
Publication number | Publication date |
---|---|
JPH0421153B2 (ja) | 1992-04-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313115 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080408 Year of fee payment: 16 |