JPS6448860U - - Google Patents

Info

Publication number
JPS6448860U
JPS6448860U JP14295987U JP14295987U JPS6448860U JP S6448860 U JPS6448860 U JP S6448860U JP 14295987 U JP14295987 U JP 14295987U JP 14295987 U JP14295987 U JP 14295987U JP S6448860 U JPS6448860 U JP S6448860U
Authority
JP
Japan
Prior art keywords
piezoelectric element
side hole
hole
fitted
length direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14295987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14295987U priority Critical patent/JPS6448860U/ja
Publication of JPS6448860U publication Critical patent/JPS6448860U/ja
Pending legal-status Critical Current

Links

JP14295987U 1987-09-21 1987-09-21 Pending JPS6448860U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14295987U JPS6448860U (cs) 1987-09-21 1987-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14295987U JPS6448860U (cs) 1987-09-21 1987-09-21

Publications (1)

Publication Number Publication Date
JPS6448860U true JPS6448860U (cs) 1989-03-27

Family

ID=31409348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14295987U Pending JPS6448860U (cs) 1987-09-21 1987-09-21

Country Status (1)

Country Link
JP (1) JPS6448860U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03185302A (ja) * 1989-12-15 1991-08-13 Hikari Gijutsu Kenkyu Kaihatsu Kk 走査トンネル顕微鏡

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62138071A (ja) * 1985-12-11 1987-06-20 Nec Corp 圧電型リニア可動子

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62138071A (ja) * 1985-12-11 1987-06-20 Nec Corp 圧電型リニア可動子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03185302A (ja) * 1989-12-15 1991-08-13 Hikari Gijutsu Kenkyu Kaihatsu Kk 走査トンネル顕微鏡

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