JPS6448034U - - Google Patents
Info
- Publication number
- JPS6448034U JPS6448034U JP14310087U JP14310087U JPS6448034U JP S6448034 U JPS6448034 U JP S6448034U JP 14310087 U JP14310087 U JP 14310087U JP 14310087 U JP14310087 U JP 14310087U JP S6448034 U JPS6448034 U JP S6448034U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer
- semiconductor
- groove
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Pile Receivers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14310087U JPH06822Y2 (ja) | 1987-09-21 | 1987-09-21 | 半導体ウエハ移載装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14310087U JPH06822Y2 (ja) | 1987-09-21 | 1987-09-21 | 半導体ウエハ移載装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6448034U true JPS6448034U (show.php) | 1989-03-24 |
| JPH06822Y2 JPH06822Y2 (ja) | 1994-01-05 |
Family
ID=31409618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14310087U Expired - Lifetime JPH06822Y2 (ja) | 1987-09-21 | 1987-09-21 | 半導体ウエハ移載装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06822Y2 (show.php) |
-
1987
- 1987-09-21 JP JP14310087U patent/JPH06822Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06822Y2 (ja) | 1994-01-05 |
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