JPS6448028U - - Google Patents
Info
- Publication number
- JPS6448028U JPS6448028U JP14335687U JP14335687U JPS6448028U JP S6448028 U JPS6448028 U JP S6448028U JP 14335687 U JP14335687 U JP 14335687U JP 14335687 U JP14335687 U JP 14335687U JP S6448028 U JPS6448028 U JP S6448028U
- Authority
- JP
- Japan
- Prior art keywords
- support plate
- semiconductor substrate
- electrode body
- container
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 1
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14335687U JPS6448028U (enExample) | 1987-09-19 | 1987-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14335687U JPS6448028U (enExample) | 1987-09-19 | 1987-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6448028U true JPS6448028U (enExample) | 1989-03-24 |
Family
ID=31410104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14335687U Pending JPS6448028U (enExample) | 1987-09-19 | 1987-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6448028U (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5857729A (ja) * | 1981-10-01 | 1983-04-06 | Toshiba Corp | 電子部品 |
| JPS58100432A (ja) * | 1981-12-11 | 1983-06-15 | Hitachi Ltd | ウエハの面取り加工方法 |
| JPS6197933A (ja) * | 1984-10-19 | 1986-05-16 | Hitachi Ltd | 全圧接型半導体装置 |
-
1987
- 1987-09-19 JP JP14335687U patent/JPS6448028U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5857729A (ja) * | 1981-10-01 | 1983-04-06 | Toshiba Corp | 電子部品 |
| JPS58100432A (ja) * | 1981-12-11 | 1983-06-15 | Hitachi Ltd | ウエハの面取り加工方法 |
| JPS6197933A (ja) * | 1984-10-19 | 1986-05-16 | Hitachi Ltd | 全圧接型半導体装置 |