JPS6446606A - Horizontal position detecting device - Google Patents

Horizontal position detecting device

Info

Publication number
JPS6446606A
JPS6446606A JP63146013A JP14601388A JPS6446606A JP S6446606 A JPS6446606 A JP S6446606A JP 63146013 A JP63146013 A JP 63146013A JP 14601388 A JP14601388 A JP 14601388A JP S6446606 A JPS6446606 A JP S6446606A
Authority
JP
Japan
Prior art keywords
wafer
objective
optical system
optical axis
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63146013A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0210361B2 (enrdf_load_stackoverflow
Inventor
Makoto Uehara
Takeshi Sudo
Fujio Kanetani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP63146013A priority Critical patent/JPS6446606A/ja
Publication of JPS6446606A publication Critical patent/JPS6446606A/ja
Publication of JPH0210361B2 publication Critical patent/JPH0210361B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP63146013A 1988-06-14 1988-06-14 Horizontal position detecting device Granted JPS6446606A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63146013A JPS6446606A (en) 1988-06-14 1988-06-14 Horizontal position detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63146013A JPS6446606A (en) 1988-06-14 1988-06-14 Horizontal position detecting device

Publications (2)

Publication Number Publication Date
JPS6446606A true JPS6446606A (en) 1989-02-21
JPH0210361B2 JPH0210361B2 (enrdf_load_stackoverflow) 1990-03-07

Family

ID=15398121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63146013A Granted JPS6446606A (en) 1988-06-14 1988-06-14 Horizontal position detecting device

Country Status (1)

Country Link
JP (1) JPS6446606A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5184926A (en) * 1990-11-05 1993-02-09 Megatool, Inc. Root-strength drill bit and method of making

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5184926A (en) * 1990-11-05 1993-02-09 Megatool, Inc. Root-strength drill bit and method of making

Also Published As

Publication number Publication date
JPH0210361B2 (enrdf_load_stackoverflow) 1990-03-07

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