JPS6446495U - - Google Patents
Info
- Publication number
- JPS6446495U JPS6446495U JP14152387U JP14152387U JPS6446495U JP S6446495 U JPS6446495 U JP S6446495U JP 14152387 U JP14152387 U JP 14152387U JP 14152387 U JP14152387 U JP 14152387U JP S6446495 U JPS6446495 U JP S6446495U
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- utility
- temperature
- scope
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14152387U JPS6446495U (nl) | 1987-09-18 | 1987-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14152387U JPS6446495U (nl) | 1987-09-18 | 1987-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6446495U true JPS6446495U (nl) | 1989-03-22 |
Family
ID=31406659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14152387U Pending JPS6446495U (nl) | 1987-09-18 | 1987-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6446495U (nl) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03145598A (ja) * | 1989-10-31 | 1991-06-20 | Fujitsu Ltd | 排気装置 |
| EP0451708A2 (en) * | 1990-04-06 | 1991-10-16 | Hitachi, Ltd. | Vacuum pump |
-
1987
- 1987-09-18 JP JP14152387U patent/JPS6446495U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03145598A (ja) * | 1989-10-31 | 1991-06-20 | Fujitsu Ltd | 排気装置 |
| EP0451708A2 (en) * | 1990-04-06 | 1991-10-16 | Hitachi, Ltd. | Vacuum pump |
| EP0451708A3 (en) * | 1990-04-06 | 1992-01-08 | Hitachi, Ltd. | Vacuum pump |