JPS62114198U - - Google Patents

Info

Publication number
JPS62114198U
JPS62114198U JP4818686U JP4818686U JPS62114198U JP S62114198 U JPS62114198 U JP S62114198U JP 4818686 U JP4818686 U JP 4818686U JP 4818686 U JP4818686 U JP 4818686U JP S62114198 U JPS62114198 U JP S62114198U
Authority
JP
Japan
Prior art keywords
atmospheric
pump
chamber
leakage path
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4818686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4818686U priority Critical patent/JPS62114198U/ja
Publication of JPS62114198U publication Critical patent/JPS62114198U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP4818686U 1986-03-31 1986-03-31 Pending JPS62114198U (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4818686U JPS62114198U (nl) 1986-03-31 1986-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4818686U JPS62114198U (nl) 1986-03-31 1986-03-31

Publications (1)

Publication Number Publication Date
JPS62114198U true JPS62114198U (nl) 1987-07-20

Family

ID=30869479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4818686U Pending JPS62114198U (nl) 1986-03-31 1986-03-31

Country Status (1)

Country Link
JP (1) JPS62114198U (nl)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
JPS5874898A (ja) * 1981-10-29 1983-05-06 Shimadzu Corp タ−ボ分子ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
JPS5874898A (ja) * 1981-10-29 1983-05-06 Shimadzu Corp タ−ボ分子ポンプ

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