JPS62114198U - - Google Patents
Info
- Publication number
- JPS62114198U JPS62114198U JP4818686U JP4818686U JPS62114198U JP S62114198 U JPS62114198 U JP S62114198U JP 4818686 U JP4818686 U JP 4818686U JP 4818686 U JP4818686 U JP 4818686U JP S62114198 U JPS62114198 U JP S62114198U
- Authority
- JP
- Japan
- Prior art keywords
- atmospheric
- pump
- chamber
- leakage path
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4818686U JPS62114198U (nl) | 1986-03-31 | 1986-03-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4818686U JPS62114198U (nl) | 1986-03-31 | 1986-03-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62114198U true JPS62114198U (nl) | 1987-07-20 |
Family
ID=30869479
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4818686U Pending JPS62114198U (nl) | 1986-03-31 | 1986-03-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62114198U (nl) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
JPS5874898A (ja) * | 1981-10-29 | 1983-05-06 | Shimadzu Corp | タ−ボ分子ポンプ |
-
1986
- 1986-03-31 JP JP4818686U patent/JPS62114198U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
JPS5874898A (ja) * | 1981-10-29 | 1983-05-06 | Shimadzu Corp | タ−ボ分子ポンプ |