JPH0264793U - - Google Patents
Info
- Publication number
- JPH0264793U JPH0264793U JP14466888U JP14466888U JPH0264793U JP H0264793 U JPH0264793 U JP H0264793U JP 14466888 U JP14466888 U JP 14466888U JP 14466888 U JP14466888 U JP 14466888U JP H0264793 U JPH0264793 U JP H0264793U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- flow path
- groove
- gas flow
- stationary member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14466888U JPH0264793U (nl) | 1988-11-04 | 1988-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14466888U JPH0264793U (nl) | 1988-11-04 | 1988-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0264793U true JPH0264793U (nl) | 1990-05-15 |
Family
ID=31412575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14466888U Pending JPH0264793U (nl) | 1988-11-04 | 1988-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0264793U (nl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015102076A (ja) * | 2013-11-28 | 2015-06-04 | エドワーズ株式会社 | 真空ポンプ用部品、シーグバーン型排気機構、および複合型真空ポンプ |
-
1988
- 1988-11-04 JP JP14466888U patent/JPH0264793U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015102076A (ja) * | 2013-11-28 | 2015-06-04 | エドワーズ株式会社 | 真空ポンプ用部品、シーグバーン型排気機構、および複合型真空ポンプ |
| KR20160090289A (ko) * | 2013-11-28 | 2016-07-29 | 에드워즈 가부시키가이샤 | 진공 펌프용 부품, 시그반형 배기 기구, 및 복합형 진공 펌프 |