JPS6445767U - - Google Patents
Info
- Publication number
- JPS6445767U JPS6445767U JP14202887U JP14202887U JPS6445767U JP S6445767 U JPS6445767 U JP S6445767U JP 14202887 U JP14202887 U JP 14202887U JP 14202887 U JP14202887 U JP 14202887U JP S6445767 U JPS6445767 U JP S6445767U
- Authority
- JP
- Japan
- Prior art keywords
- coil cover
- coil
- air bearing
- bearing mechanism
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 230000006698 induction Effects 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14202887U JPS6445767U (no) | 1987-09-17 | 1987-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14202887U JPS6445767U (no) | 1987-09-17 | 1987-09-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445767U true JPS6445767U (no) | 1989-03-20 |
Family
ID=31407617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14202887U Pending JPS6445767U (no) | 1987-09-17 | 1987-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445767U (no) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001118837A (ja) * | 1992-09-07 | 2001-04-27 | Mitsubishi Electric Corp | 半導体製造装置 |
| JP2011025022A (ja) * | 2009-06-29 | 2011-02-10 | Tana-X:Kk | 商品展示器および商品展示用板材 |
| JP2011224075A (ja) * | 2010-04-16 | 2011-11-10 | Rengo Co Ltd | 陳列パネル |
| WO2014087920A1 (ja) * | 2012-12-04 | 2014-06-12 | 東京エレクトロン株式会社 | 成膜装置 |
-
1987
- 1987-09-17 JP JP14202887U patent/JPS6445767U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001118837A (ja) * | 1992-09-07 | 2001-04-27 | Mitsubishi Electric Corp | 半導体製造装置 |
| JP2011025022A (ja) * | 2009-06-29 | 2011-02-10 | Tana-X:Kk | 商品展示器および商品展示用板材 |
| JP2011224075A (ja) * | 2010-04-16 | 2011-11-10 | Rengo Co Ltd | 陳列パネル |
| WO2014087920A1 (ja) * | 2012-12-04 | 2014-06-12 | 東京エレクトロン株式会社 | 成膜装置 |
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