JPS644560Y2 - - Google Patents
Info
- Publication number
- JPS644560Y2 JPS644560Y2 JP5359984U JP5359984U JPS644560Y2 JP S644560 Y2 JPS644560 Y2 JP S644560Y2 JP 5359984 U JP5359984 U JP 5359984U JP 5359984 U JP5359984 U JP 5359984U JP S644560 Y2 JPS644560 Y2 JP S644560Y2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- drawn
- guide rollers
- mounting table
- drawing material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 38
- 238000000609 electron-beam lithography Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5359984U JPS60166600U (ja) | 1984-04-12 | 1984-04-12 | 被描画材のセツト治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5359984U JPS60166600U (ja) | 1984-04-12 | 1984-04-12 | 被描画材のセツト治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60166600U JPS60166600U (ja) | 1985-11-05 |
| JPS644560Y2 true JPS644560Y2 (enrdf_load_stackoverflow) | 1989-02-06 |
Family
ID=30574617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5359984U Granted JPS60166600U (ja) | 1984-04-12 | 1984-04-12 | 被描画材のセツト治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60166600U (enrdf_load_stackoverflow) |
-
1984
- 1984-04-12 JP JP5359984U patent/JPS60166600U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60166600U (ja) | 1985-11-05 |
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