JPS6445168U - - Google Patents
Info
- Publication number
- JPS6445168U JPS6445168U JP13449187U JP13449187U JPS6445168U JP S6445168 U JPS6445168 U JP S6445168U JP 13449187 U JP13449187 U JP 13449187U JP 13449187 U JP13449187 U JP 13449187U JP S6445168 U JPS6445168 U JP S6445168U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- plating
- center
- cathode
- aligned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 238000009713 electroplating Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Electroplating Methods And Accessories (AREA)
Description
図は、本考案の一実施例のめつき装置の系統図
。
１……基板、２……アノード、３……円筒、４
……貯槽。
The figure is a system diagram of a plating device according to an embodiment of the present invention. 1...Substrate, 2...Anode, 3...Cylinder, 4
...Storage tank.
Claims (1)
気めつき装置において、 前記筒の中心をカソードの中心と一致させて設
け、前記筒の中を流れるめつき液をカソード側か
らアノード側へ流すことを特徴とするめつき装置
。[Claims for Utility Model Registration] A copper electroplating device in which two plating baths are connected by a single tube, wherein the center of the tube is aligned with the center of a cathode, and the plating bath flows through the tube. A plating device characterized by flowing a liquid from the cathode side to the anode side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13449187U JPS6445168U (en) | 1987-09-04 | 1987-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13449187U JPS6445168U (en) | 1987-09-04 | 1987-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445168U true JPS6445168U (en) | 1989-03-17 |
Family
ID=31393294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13449187U Pending JPS6445168U (en) | 1987-09-04 | 1987-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445168U (en) |
-
1987
- 1987-09-04 JP JP13449187U patent/JPS6445168U/ja active Pending
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