JPS6444016A - Quartz reaction tube - Google Patents

Quartz reaction tube

Info

Publication number
JPS6444016A
JPS6444016A JP20002087A JP20002087A JPS6444016A JP S6444016 A JPS6444016 A JP S6444016A JP 20002087 A JP20002087 A JP 20002087A JP 20002087 A JP20002087 A JP 20002087A JP S6444016 A JPS6444016 A JP S6444016A
Authority
JP
Japan
Prior art keywords
reaction tube
quartz reaction
mica
tube wall
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20002087A
Other languages
English (en)
Inventor
Takeshi Mitsushima
Akira Mitsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP20002087A priority Critical patent/JPS6444016A/ja
Publication of JPS6444016A publication Critical patent/JPS6444016A/ja
Pending legal-status Critical Current

Links

JP20002087A 1987-08-12 1987-08-12 Quartz reaction tube Pending JPS6444016A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20002087A JPS6444016A (en) 1987-08-12 1987-08-12 Quartz reaction tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20002087A JPS6444016A (en) 1987-08-12 1987-08-12 Quartz reaction tube

Publications (1)

Publication Number Publication Date
JPS6444016A true JPS6444016A (en) 1989-02-16

Family

ID=16417472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20002087A Pending JPS6444016A (en) 1987-08-12 1987-08-12 Quartz reaction tube

Country Status (1)

Country Link
JP (1) JPS6444016A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6288368B1 (en) 1997-05-27 2001-09-11 Hitachi, Ltd. Vacuum heating furnace with tapered portion
JP2013211521A (ja) * 2012-03-02 2013-10-10 Stanley Electric Co Ltd 気相成長装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6288368B1 (en) 1997-05-27 2001-09-11 Hitachi, Ltd. Vacuum heating furnace with tapered portion
JP2013211521A (ja) * 2012-03-02 2013-10-10 Stanley Electric Co Ltd 気相成長装置

Similar Documents

Publication Publication Date Title
DE3261484D1 (en) Annular combustion chamber with an annular burner for gas turbines
JPS6444016A (en) Quartz reaction tube
JPS6444017A (en) Quartz reaction tube
JPS5719532A (en) Electric heater
JPS547627A (en) Sealing mechanism for dispreser plate
JPS5533932A (en) Mechanical seal
JPS5682311A (en) Combustor
JPS5565837A (en) Table range
JPS5351490A (en) Sealing jig for air-proof terminal
JPS5694760A (en) Semiconductor device
JPS52140936A (en) Solar heat collector
JPS5383485A (en) Diffusion type semiconductor pressure transducer
JPS52122725A (en) Circulating exhaust gas valve
JPS52149651A (en) Sheath heater
JPS5287595A (en) Fuel assembly of reactor
JPS5516285A (en) Electrode holder
JPS53114671A (en) Manufacture for semiconductor device
JPS5429974A (en) Semiconductor device of resin sealing type
JPS5359938A (en) Induction heater
JPS538833A (en) Furnace hot water leakage detector
JPS57142006A (en) Dual reflecting mirror type antenna device
JPS5361965A (en) Manufacture of color picture tube
JPS5385172A (en) Heat radiating mechanism of electronic device
JPS5516286A (en) Electrode holder
JPS5256864A (en) Semiconductor device