JPS6444016A - Quartz reaction tube - Google Patents
Quartz reaction tubeInfo
- Publication number
- JPS6444016A JPS6444016A JP20002087A JP20002087A JPS6444016A JP S6444016 A JPS6444016 A JP S6444016A JP 20002087 A JP20002087 A JP 20002087A JP 20002087 A JP20002087 A JP 20002087A JP S6444016 A JPS6444016 A JP S6444016A
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- quartz reaction
- mica
- tube wall
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20002087A JPS6444016A (en) | 1987-08-12 | 1987-08-12 | Quartz reaction tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20002087A JPS6444016A (en) | 1987-08-12 | 1987-08-12 | Quartz reaction tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6444016A true JPS6444016A (en) | 1989-02-16 |
Family
ID=16417472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20002087A Pending JPS6444016A (en) | 1987-08-12 | 1987-08-12 | Quartz reaction tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6444016A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6288368B1 (en) | 1997-05-27 | 2001-09-11 | Hitachi, Ltd. | Vacuum heating furnace with tapered portion |
JP2013211521A (ja) * | 2012-03-02 | 2013-10-10 | Stanley Electric Co Ltd | 気相成長装置 |
-
1987
- 1987-08-12 JP JP20002087A patent/JPS6444016A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6288368B1 (en) | 1997-05-27 | 2001-09-11 | Hitachi, Ltd. | Vacuum heating furnace with tapered portion |
JP2013211521A (ja) * | 2012-03-02 | 2013-10-10 | Stanley Electric Co Ltd | 気相成長装置 |
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