JPS6444017A - Quartz reaction tube - Google Patents

Quartz reaction tube

Info

Publication number
JPS6444017A
JPS6444017A JP20002187A JP20002187A JPS6444017A JP S6444017 A JPS6444017 A JP S6444017A JP 20002187 A JP20002187 A JP 20002187A JP 20002187 A JP20002187 A JP 20002187A JP S6444017 A JPS6444017 A JP S6444017A
Authority
JP
Japan
Prior art keywords
quartz
reaction tube
opening
section
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20002187A
Other languages
Japanese (ja)
Inventor
Takeshi Mitsushima
Akira Mitsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP20002187A priority Critical patent/JPS6444017A/en
Publication of JPS6444017A publication Critical patent/JPS6444017A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a quartz reaction tube which intercepts a radiated heat and prevents it from transferring to a sealing material by providing an opaque quartz section at a quartz tube wall at the intermediate point between an opening to be coated with a metal cover and a high temperature reactor. CONSTITUTION:An annular opaque quartz section 1b is formed between a high temperature reactor 1a and an opening on which an O-ring 2 is mounted. According to this structure, radiated heat transferred in the tube wall while repeating reflections from the reactor 1a as indicated by an arrow A is mostly reflected or absorbed by the section 1b, the heat which is transferred to the opening is extremely small to largely reduce the temperature of the ring 2. Thus, the temperature of a sealing material drops to improve its durability, stable sealing effect is obtained, and the quartz reaction tube having high reliability is attained.
JP20002187A 1987-08-12 1987-08-12 Quartz reaction tube Pending JPS6444017A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20002187A JPS6444017A (en) 1987-08-12 1987-08-12 Quartz reaction tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20002187A JPS6444017A (en) 1987-08-12 1987-08-12 Quartz reaction tube

Publications (1)

Publication Number Publication Date
JPS6444017A true JPS6444017A (en) 1989-02-16

Family

ID=16417491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20002187A Pending JPS6444017A (en) 1987-08-12 1987-08-12 Quartz reaction tube

Country Status (1)

Country Link
JP (1) JPS6444017A (en)

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