JPS6442188A - Excimer laser apparatus - Google Patents

Excimer laser apparatus

Info

Publication number
JPS6442188A
JPS6442188A JP19813787A JP19813787A JPS6442188A JP S6442188 A JPS6442188 A JP S6442188A JP 19813787 A JP19813787 A JP 19813787A JP 19813787 A JP19813787 A JP 19813787A JP S6442188 A JPS6442188 A JP S6442188A
Authority
JP
Japan
Prior art keywords
laser
optical members
gas
laser optical
cleaned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19813787A
Other languages
Japanese (ja)
Other versions
JPH07118556B2 (en
Inventor
Hajime Nakatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62198137A priority Critical patent/JPH07118556B2/en
Publication of JPS6442188A publication Critical patent/JPS6442188A/en
Publication of JPH07118556B2 publication Critical patent/JPH07118556B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H01S3/0346—Protection of windows or mirrors against deleterious effects

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To facilitate prolongation of the life of laser optical members by a method wherein narrow paths through which a laser beam can be transmitted are provided between the laser optical members and a pair of discharge electrodes and laser gas cleaned by a gas cleaner is introduced into the neighborhoods of the laser optical members. CONSTITUTION:Narrow paths 18a and 18b through which a laser beam can be transmitted are provided between laser optical members 6 and 7 and a pair of discharge electrodes 3 and laser gas cleaned by a gas cleaner is introduced into the neighborhoods of the laser optical members 6 and 7. As a result, the cleaned laser gas 16 always flows through the narrow paths 18a and 18b to the directions shown by arrows 19a and 19b and only the cleaned laser gas exists in the neighborhoods of the laser optical members 6 and 7. Therefore, the laser optical members 6 and 7 are protected from contamination caused by fine particles and impurity gas contained in the laser gas and the prolongation of the life of the laser optical members can be realized.
JP62198137A 1987-08-10 1987-08-10 Excimer laser device Expired - Lifetime JPH07118556B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62198137A JPH07118556B2 (en) 1987-08-10 1987-08-10 Excimer laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62198137A JPH07118556B2 (en) 1987-08-10 1987-08-10 Excimer laser device

Publications (2)

Publication Number Publication Date
JPS6442188A true JPS6442188A (en) 1989-02-14
JPH07118556B2 JPH07118556B2 (en) 1995-12-18

Family

ID=16386064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62198137A Expired - Lifetime JPH07118556B2 (en) 1987-08-10 1987-08-10 Excimer laser device

Country Status (1)

Country Link
JP (1) JPH07118556B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01115179A (en) * 1987-10-28 1989-05-08 Matsushita Electric Ind Co Ltd Gas laser apparatus
EP0459491A2 (en) * 1990-06-01 1991-12-04 Mitsui Petrochemical Industries, Ltd. Gas laser apparatus
JPH042186A (en) * 1990-04-19 1992-01-07 Matsushita Electric Ind Co Ltd Excimer laser
JPH06152005A (en) * 1992-11-13 1994-05-31 Komatsu Ltd Laser system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639178A (en) * 1986-06-30 1988-01-14 Komatsu Ltd Gas laser device
JPS63108786A (en) * 1986-10-25 1988-05-13 Hitachi Ltd Gas laser generator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639178A (en) * 1986-06-30 1988-01-14 Komatsu Ltd Gas laser device
JPS63108786A (en) * 1986-10-25 1988-05-13 Hitachi Ltd Gas laser generator

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01115179A (en) * 1987-10-28 1989-05-08 Matsushita Electric Ind Co Ltd Gas laser apparatus
JPH042186A (en) * 1990-04-19 1992-01-07 Matsushita Electric Ind Co Ltd Excimer laser
EP0459491A2 (en) * 1990-06-01 1991-12-04 Mitsui Petrochemical Industries, Ltd. Gas laser apparatus
JPH06152005A (en) * 1992-11-13 1994-05-31 Komatsu Ltd Laser system

Also Published As

Publication number Publication date
JPH07118556B2 (en) 1995-12-18

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