JPS6442119A - Vertical-type reaction device - Google Patents
Vertical-type reaction deviceInfo
- Publication number
- JPS6442119A JPS6442119A JP19850987A JP19850987A JPS6442119A JP S6442119 A JPS6442119 A JP S6442119A JP 19850987 A JP19850987 A JP 19850987A JP 19850987 A JP19850987 A JP 19850987A JP S6442119 A JPS6442119 A JP S6442119A
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- spacer
- thermocouple
- wall
- tip part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To always keep a definite distance between a tip part of a thermocouple and an outer wall of a reaction tube by a method wherein a recessed spacer is installed at the tip part of the thermocouple and the spacer is brought into contact with the outer wall of the reaction tube. CONSTITUTION:A thermocouple 5 for temperature adjustment use is installed in such a way that it pierces a heater 2; a recessed spacer 7 used to keep a definite distance is fixed to a tip part of the thermocouple 5 and is brought into contact with an outer wall of a reaction tube 1. The spacer 7 is attached to the tip part of all thermocouples which are installed after piercing the heater. By this setup, even when the thermocouples are displaced due to a deviation lof the reaction tube, the deviation can be adjusted by referring to a contact state between the spacer 7 and the reaction tube 1. By this setup, the individual thermocouples can be positioned by keeping a definite distance with reference to the outer wall of the reaction tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19850987A JPS6442119A (en) | 1987-08-07 | 1987-08-07 | Vertical-type reaction device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19850987A JPS6442119A (en) | 1987-08-07 | 1987-08-07 | Vertical-type reaction device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6442119A true JPS6442119A (en) | 1989-02-14 |
Family
ID=16392320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19850987A Pending JPS6442119A (en) | 1987-08-07 | 1987-08-07 | Vertical-type reaction device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6442119A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016157930A (en) * | 2015-02-25 | 2016-09-01 | 株式会社日立国際電気 | Substrate processing apparatus, thermo couple, and manufacturing method of semiconductor device |
| US10684174B2 (en) | 2015-02-25 | 2020-06-16 | Kokusai Electric Corporation | Substrate processing apparatus, and thermocouple |
-
1987
- 1987-08-07 JP JP19850987A patent/JPS6442119A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016157930A (en) * | 2015-02-25 | 2016-09-01 | 株式会社日立国際電気 | Substrate processing apparatus, thermo couple, and manufacturing method of semiconductor device |
| US10684174B2 (en) | 2015-02-25 | 2020-06-16 | Kokusai Electric Corporation | Substrate processing apparatus, and thermocouple |
| US11300456B2 (en) | 2015-02-25 | 2022-04-12 | Kokusai Electric Corporation | Substrate processing apparatus, and thermocouple |
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