JPS6442110A - Formation of conductor pattern - Google Patents
Formation of conductor patternInfo
- Publication number
- JPS6442110A JPS6442110A JP19807087A JP19807087A JPS6442110A JP S6442110 A JPS6442110 A JP S6442110A JP 19807087 A JP19807087 A JP 19807087A JP 19807087 A JP19807087 A JP 19807087A JP S6442110 A JPS6442110 A JP S6442110A
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- pattern
- trapezoidal shape
- inverted trapezoidal
- formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To enhance the reproducibility of the formation of a pattern by a method wherein a photoresist pattern with an inverted trapezoidal shape whose taper angle is larger than 90 deg. is used instead of a pattern having an overhang. CONSTITUTION:If a conductor material is evaporated from an upper part of photoresist patterns with an inverted trapezoidal shape, side walls of the inverted trapezoidal shape produce shadowy parts; this causes spaces which are not reached by particles to be evaporated; a conductor pattern formed between the photoresist patterns is not connected to a conductor material to be formed on a photoresist. If the photoresist is dissolved by using a solvent, an excess conductor material formed on the photoresist is removed. By this setup, a conductor pattern which is reversed with reference to the photoresist patterns can be obtained with good reproducibility.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19807087A JPS6442110A (en) | 1987-08-10 | 1987-08-10 | Formation of conductor pattern |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19807087A JPS6442110A (en) | 1987-08-10 | 1987-08-10 | Formation of conductor pattern |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6442110A true JPS6442110A (en) | 1989-02-14 |
Family
ID=16385023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19807087A Pending JPS6442110A (en) | 1987-08-10 | 1987-08-10 | Formation of conductor pattern |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6442110A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002033215A (en) * | 2000-07-14 | 2002-01-31 | Murata Mfg Co Ltd | Conductor pattern and electronic component provided therewith |
| US7107666B2 (en) * | 1998-07-23 | 2006-09-19 | Bh Electronics | Method of manufacturing an ultra-miniature magnetic device |
| US20140225700A1 (en) * | 2013-02-08 | 2014-08-14 | Qualcomm Incorporated | Substrate-less discrete coupled inductor structure |
| US11749455B2 (en) | 2022-01-10 | 2023-09-05 | Bh Electronics, Inc. | Methods of fabricating ultra-miniature laminated magnetic cores and devices |
-
1987
- 1987-08-10 JP JP19807087A patent/JPS6442110A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7107666B2 (en) * | 1998-07-23 | 2006-09-19 | Bh Electronics | Method of manufacturing an ultra-miniature magnetic device |
| JP2002033215A (en) * | 2000-07-14 | 2002-01-31 | Murata Mfg Co Ltd | Conductor pattern and electronic component provided therewith |
| US6723494B2 (en) | 2000-07-14 | 2004-04-20 | Murata Manufacturing Co., Ltd. | Conductor pattern and electronic component having the same |
| US20140225700A1 (en) * | 2013-02-08 | 2014-08-14 | Qualcomm Incorporated | Substrate-less discrete coupled inductor structure |
| US11749455B2 (en) | 2022-01-10 | 2023-09-05 | Bh Electronics, Inc. | Methods of fabricating ultra-miniature laminated magnetic cores and devices |
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