JPS6441292A - Semiconductor laser array - Google Patents
Semiconductor laser arrayInfo
- Publication number
- JPS6441292A JPS6441292A JP19765287A JP19765287A JPS6441292A JP S6441292 A JPS6441292 A JP S6441292A JP 19765287 A JP19765287 A JP 19765287A JP 19765287 A JP19765287 A JP 19765287A JP S6441292 A JPS6441292 A JP S6441292A
- Authority
- JP
- Japan
- Prior art keywords
- regions
- high resistance
- layer
- substrate
- resistance regions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Lasers (AREA)
Abstract
PURPOSE:To facilitate isolation between respective devices, by forming high resistance regions between respective laser oscillation devices. CONSTITUTION:Stripe grooves are formed on a GaAs substrate 1, and next a clad layer 2, an optical waveguide layer 3, an active layer 4, an optical reflection layer 5, current block layers 8 and 9 are formed serially on this substrate. In succession, a mask 21 is used to implant Ga ions to reach the substrate 1 and to form high resistance regions 33. Next, another mask is used to open windows in current injection regions, and Zn is made to reach the optical reflection film 5 by thermal diffusion to form low resistance Zn diffusion regions 23. An electrode 11 is formed to be striped, and an insulation film 10 is formed on the surface of the high resistance regions 33. Carriers injected by the electrode 11 separated on such a striped state do not expand transversally but pass through the Zn diffusion regions 23 and flow into the active layer 4, so that a high performance operation controlled on a transverse mode can be obtained. Further the respective devices are separated by not the grooves but the high resistance regions, and so device yield can be improved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19765287A JPS6441292A (en) | 1987-08-07 | 1987-08-07 | Semiconductor laser array |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19765287A JPS6441292A (en) | 1987-08-07 | 1987-08-07 | Semiconductor laser array |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6441292A true JPS6441292A (en) | 1989-02-13 |
Family
ID=16378061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19765287A Pending JPS6441292A (en) | 1987-08-07 | 1987-08-07 | Semiconductor laser array |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6441292A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009212538A (en) * | 2009-06-22 | 2009-09-17 | Sony Corp | Semiconductor light emitting device, and manufacturing method thereof |
-
1987
- 1987-08-07 JP JP19765287A patent/JPS6441292A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009212538A (en) * | 2009-06-22 | 2009-09-17 | Sony Corp | Semiconductor light emitting device, and manufacturing method thereof |
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