JPS6440089U - - Google Patents
Info
- Publication number
- JPS6440089U JPS6440089U JP1987135114U JP13511487U JPS6440089U JP S6440089 U JPS6440089 U JP S6440089U JP 1987135114 U JP1987135114 U JP 1987135114U JP 13511487 U JP13511487 U JP 13511487U JP S6440089 U JPS6440089 U JP S6440089U
- Authority
- JP
- Japan
- Prior art keywords
- fixed part
- elastic hinge
- thin flexible
- arm
- movable section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987135114U JPH0543439Y2 (enExample) | 1987-09-03 | 1987-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987135114U JPH0543439Y2 (enExample) | 1987-09-03 | 1987-09-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6440089U true JPS6440089U (enExample) | 1989-03-09 |
| JPH0543439Y2 JPH0543439Y2 (enExample) | 1993-11-01 |
Family
ID=31394458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987135114U Expired - Lifetime JPH0543439Y2 (enExample) | 1987-09-03 | 1987-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543439Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007040537A (ja) * | 2002-09-30 | 2007-02-15 | Asml Netherlands Bv | リソグラフィ投影装置 |
-
1987
- 1987-09-03 JP JP1987135114U patent/JPH0543439Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007040537A (ja) * | 2002-09-30 | 2007-02-15 | Asml Netherlands Bv | リソグラフィ投影装置 |
| US7239369B2 (en) | 2002-09-30 | 2007-07-03 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7417711B2 (en) | 2002-09-30 | 2008-08-26 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543439Y2 (enExample) | 1993-11-01 |