JPS6440089U - - Google Patents
Info
- Publication number
- JPS6440089U JPS6440089U JP1987135114U JP13511487U JPS6440089U JP S6440089 U JPS6440089 U JP S6440089U JP 1987135114 U JP1987135114 U JP 1987135114U JP 13511487 U JP13511487 U JP 13511487U JP S6440089 U JPS6440089 U JP S6440089U
- Authority
- JP
- Japan
- Prior art keywords
- fixed part
- elastic hinge
- thin flexible
- arm
- movable section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Description
第１図は本考案の一実施例を示す平面図、第２
図は従来の微動回転ステージの一実施例を示す平
面図である。
１……固定部、２……可動部、３……薄肉可撓
部、４，５……ピエゾ素子（リニアアクチユエー
タ）、６，７，９……弾性ヒンジ、８……アーム
部、１０……突出部。
Figure 1 is a plan view showing one embodiment of the present invention;
The figure is a plan view showing an example of a conventional fine rotation stage. 1... Fixed part, 2... Movable part, 3... Thin flexible part, 4, 5... Piezo element (linear actuator), 6, 7, 9... Elastic hinge, 8... Arm part, 10... Protrusion.
Claims (1)
なくとも３個以上の薄肉可撓部と、該薄肉可撓部
の他端で支持した可撓部と、前記固定部と前記可
動部の間にあり、前記可動部の求心方向に第１の
弾性ヒンジを介して連結されアーム部と、該アー
ム部と前記固定部の間にあつて前記アーム部の第
１の弾性ヒンジと直角方向に変位を発生可能でそ
れぞれ少なくとも１個ずつの弾性ヒンジを介して
前記アーム部と前記固定部に連結した２個のリニ
アアクチユエータとを含むことを特徴とする微動
回転ステージ。 ２ 上記固定部と、薄肉可撓部と、可動部と、ア
ーム部とを一体で形成しリニアアクチユエータが
圧入されていることを特徴とする実用新案登録請
求の範囲第１項記載の微動回転ステージ。 ３ 上記２個のリニアアクチユエータがピエゾ素
子であることを特徴とする実用新案登録請求の範
囲第１項記載の微動回転ステージ。[Claims for Utility Model Registration] 1. A fixed part, at least three thin flexible parts projecting radially from the fixed part, a flexible part supported at the other end of the thin flexible part, and the fixed part. an arm section located between the movable section and the movable section and connected via a first elastic hinge in the centripetal direction of the movable section; A fine rotation rotation stage comprising two linear actuators capable of generating displacement in a direction perpendicular to an elastic hinge and each connected to the arm part and the fixed part via at least one elastic hinge. . 2. Fine movement according to claim 1 of the utility model registration claim, characterized in that the fixed part, the thin flexible part, the movable part, and the arm part are integrally formed and a linear actuator is press-fitted therein. rotating stage. 3. The fine movement rotation stage according to claim 1, wherein the two linear actuators are piezo elements.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987135114U JPH0543439Y2 (en) | 1987-09-03 | 1987-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987135114U JPH0543439Y2 (en) | 1987-09-03 | 1987-09-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6440089U true JPS6440089U (en) | 1989-03-09 |
| JPH0543439Y2 JPH0543439Y2 (en) | 1993-11-01 |
Family
ID=31394458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987135114U Expired - Lifetime JPH0543439Y2 (en) | 1987-09-03 | 1987-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543439Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007040537A (en) * | 2002-09-30 | 2007-02-15 | Asml Netherlands Bv | Lithographic projection apparatus |
-
1987
- 1987-09-03 JP JP1987135114U patent/JPH0543439Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007040537A (en) * | 2002-09-30 | 2007-02-15 | Asml Netherlands Bv | Lithographic projection apparatus |
| US7239369B2 (en) | 2002-09-30 | 2007-07-03 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7417711B2 (en) | 2002-09-30 | 2008-08-26 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543439Y2 (en) | 1993-11-01 |
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