JPH05153790A - Micromotion rotating mechanism - Google Patents

Micromotion rotating mechanism

Info

Publication number
JPH05153790A
JPH05153790A JP33777291A JP33777291A JPH05153790A JP H05153790 A JPH05153790 A JP H05153790A JP 33777291 A JP33777291 A JP 33777291A JP 33777291 A JP33777291 A JP 33777291A JP H05153790 A JPH05153790 A JP H05153790A
Authority
JP
Japan
Prior art keywords
rotary shaft
drive
shaft holding
elastic hinge
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33777291A
Other languages
Japanese (ja)
Inventor
Yoshikazu Ikuta
美和 生田
Hideo Ichimura
英男 市村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP33777291A priority Critical patent/JPH05153790A/en
Publication of JPH05153790A publication Critical patent/JPH05153790A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To cope with an arbitrary diameter of a rotating shaft and to obtain a rotating range infinitely by mechanically synchronizing fixing and driving of the shaft in a mechanism for rotating the shaft. CONSTITUTION:A mechanism for rotating a rotating shaft 15 rotatably placed on a base by an incrementally driving method for continuously rotating it by repeating a fine rotational movement has a rotating shaft holding member 16 for pressurizing to fix the shaft 15, a rotating shaft holding and driving member 20 for pressurizing to fix the shaft 15 and frictionally driving the shaft 15, and two driving members mounted on the members 16 and 20.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、物体位置の回転を高精
度に行わせる回転微動機構に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fine rotation mechanism for rotating an object position with high accuracy.

【0002】[0002]

【従来の技術】図3は例えば特開昭58−139681
号公報に示された従来の回転微動機構の概略構成図を示
すもので、aは平面図、bはaのA−A線断面図、cは
aのB−B線断面図である。図において、1は回転板
で、この回転板1は半円板状の第1及び第2の移動部材
2、3を弾性ヒンジ4で接続して構成されている。な
お、実際には円板の中心軸を対称とする該円板の外周部
2箇所をそれぞれ一部切り欠くと共に、該切り欠き部か
ら中心軸に向かってそれぞれ切り込みを設けることによ
って、上記移動部材2、3及び弾性ヒンジ4からなる回
転板1が形成される。そして、回転板1は基台5上に移
動自在に載置されると共にその中心である弾性ヒンジ4
の下面に設けたピン6によって回転の中心が規定されて
いる。回転板1の前記切り欠き部には、第1及び第2の
駆動部材7、8がそれぞれ設けられている。これらの駆
動部材7、8はそれぞれ印加電圧に応じて伸縮する圧電
素子からなるもので、その伸縮方向(図中に示す矢印方
向)の両端に前記第1及び第2の移動部材2、3がそれ
ぞれ固定されている。一方、前記回転板1の上方には、
前記駆動部材7、8と同様な圧電素子からなる第1及び
第2の固定部材9、10がそれぞれ設けられている。こ
れらの固定部材9、10の伸縮方向の一端はそれぞれ固
定軸に固定されている。そして固定部材9、10は電圧
を印加されることにより、その他端(自由端)で前記回
転板1を基台5上に押し付けて固定するものとなってい
る。
2. Description of the Prior Art FIG. 3 shows, for example, Japanese Patent Laid-Open No. 58-139681.
2A and 2B are schematic configuration diagrams of a conventional rotary fine movement mechanism disclosed in Japanese Patent Publication No. JP-A-2003-264, where a is a plan view, b is a sectional view taken along the line AA of a, and c is a sectional view taken along the line BB of a. In the figure, reference numeral 1 is a rotary plate, and the rotary plate 1 is constituted by connecting first and second moving members 2 and 3 having a semi-circular plate shape by an elastic hinge 4. Actually, the moving member is formed by partially cutting out two outer peripheral portions of the disk which are symmetric with respect to the central axis of the disk and providing notches from the notch toward the central axis. The rotary plate 1 including the second and third and elastic hinges 4 is formed. The rotary plate 1 is movably mounted on a base 5 and has an elastic hinge 4 at the center thereof.
The center of rotation is defined by the pin 6 provided on the lower surface of the. First and second drive members 7 and 8 are provided in the cutout portion of the rotary plate 1, respectively. Each of these driving members 7 and 8 is composed of a piezoelectric element that expands and contracts according to an applied voltage, and the first and second moving members 2 and 3 are provided at both ends in the expansion and contraction direction (arrow direction shown in the figure). Each is fixed. On the other hand, above the rotary plate 1,
First and second fixing members 9 and 10 made of piezoelectric elements similar to the driving members 7 and 8 are provided, respectively. One ends of the fixing members 9 and 10 in the expansion / contraction direction are fixed to fixed shafts. When the fixing members 9 and 10 are applied with a voltage, the rotating plate 1 is pressed and fixed on the base 5 at the other end (free end).

【0003】次に図4を用いて動作について説明する。
まず、前記第2の固定部材10を伸長させて第2の移動
部材3を基台5上に押し付けて固定する。この状態で第
1の駆動部材7を伸長させると共に、第2の駆動部材8
を伸長させる。これにより、第1の移動部材2は図4
(a)に示す如く、弾性ヒンジ4のひずみにより同ヒン
ジ4を中心として矢印Pの方向に微小回転する。次に、
前記第1の固定部材9を伸長させて第1の移動部材2を
基台5上に固定し、その後第2の固定部材10を伸長さ
せて第2の移動部材3の固定を解除する。この状態で第
1の固定部材7を伸長させると共に、第2の駆動部材8
を伸長させると、第2の移動部材3が図4(b)に示す
如く、弾性ヒンジ4を中心として矢印Pの方向に微小回
転する。以上の操作を繰り返すことによって、第1及び
第2からなる回転板1は、弾性ヒンジ4のひずみにより
ピン6を中心として矢印P方向に回転せしめられること
になる。
Next, the operation will be described with reference to FIG.
First, the second fixing member 10 is extended and the second moving member 3 is pressed and fixed onto the base 5. In this state, the first drive member 7 is extended and the second drive member 8 is extended.
To stretch. As a result, the first moving member 2 is moved to the position shown in FIG.
As shown in (a), the elastic hinge 4 is slightly rotated in the direction of arrow P about the hinge 4 due to the strain. next,
The first fixing member 9 is extended to fix the first moving member 2 on the base 5, and then the second fixing member 10 is extended to release the fixing of the second moving member 3. In this state, the first fixing member 7 is extended and the second driving member 8
Is extended, the second moving member 3 makes a minute rotation in the direction of arrow P about the elastic hinge 4 as shown in FIG. 4 (b). By repeating the above operation, the rotating plate 1 composed of the first and second parts is rotated in the arrow P direction about the pin 6 due to the strain of the elastic hinge 4.

【0004】[0004]

【発明が解決しようとする課題】従来の回転微動機構は
上記のように回転軸を回転させる機能と回転軸を固定す
る機能が互いに独立しているため、上記機能に付随する
圧電素子からなる駆動部材が少なくとも4つ必要であ
り、回転軸の固定と駆動の同期を取るのが容易ではな
く、また回転軸内に駆動部材を挿入しているため、回転
軸径の大きさが駆動部材の大きさに拘束され、回転軸径
及び回転範囲に制限があった。
As described above, since the function of rotating the rotary shaft and the function of fixing the rotary shaft are independent of each other in the conventional rotary fine motion mechanism, the driving mechanism including the piezoelectric element associated with the above function is used. Since at least four members are required, it is not easy to synchronize the fixing of the rotating shaft and the driving, and since the driving member is inserted in the rotating shaft, the size of the rotating shaft is large. However, the rotation shaft diameter and the rotation range were limited.

【0005】この発明は上記のような問題点を解消する
ためになされたもので、回転軸を加圧固定する回転軸保
持部材と、回転軸を加圧固定しかつ回転軸を摩擦駆動さ
せる回転軸保持駆動部材を一体化した2つの駆動部材で
構成することによって、回転軸の固定と駆動の同期が機
械的に行え、また回転微動機構自体を回転軸周上に配置
することによって任意の回転軸径に対応可能でかつ回転
範囲が無限に得られる回転微動機構を提供することを目
的とする。
The present invention has been made to solve the above problems, and a rotary shaft holding member for pressing and fixing a rotary shaft, and a rotation for pressing and fixing the rotary shaft and frictionally driving the rotary shaft. By configuring the shaft holding drive member with two integrated drive members, the rotation shaft can be mechanically fixed and the drive can be synchronized, and the rotation fine movement mechanism itself can be arranged on the circumference of the rotation shaft to allow arbitrary rotation. An object of the present invention is to provide a fine rotation mechanism capable of responding to a shaft diameter and having an infinite rotation range.

【0006】[0006]

【課題を解決するための手段】この発明に係る回転微動
機構は、基台に支持され回転軸を加圧固定する回転軸保
持部材と、回転軸を加圧固定しかつ回転軸を摩擦駆動さ
せる回転軸保持駆動部材と、回転軸保持部材と回転軸保
持駆動部材に装着される合計2つの駆動部材で構成した
ものである。
SUMMARY OF THE INVENTION A rotary fine movement mechanism according to the present invention includes a rotary shaft holding member that is supported by a base and press-fixes a rotary shaft, and a rotary shaft that press-fixes and frictionally drives the rotary shaft. The rotary shaft holding drive member is composed of a rotary shaft holding member and a total of two drive members mounted on the rotary shaft holding drive member.

【0007】[0007]

【作用】この発明における回転軸を加圧固定する回転軸
保持部材と、回転軸を加圧固定しかつ回転軸を摩擦駆動
させ上記回転軸保持部材と一体化され逆位相で駆動する
回転軸保持駆動部材は、回転軸保持部材と回転軸保持駆
動部材にそれぞれ装着された合計2つの駆動部材で駆動
され、回転軸の任意の位置を摩擦駆動することにより微
動回転させ、この微動回転を繰り返し行うことで連続回
転を行う歩進動作駆動により回転軸を回転させる。
According to the present invention, a rotary shaft holding member for pressing and fixing the rotary shaft, and a rotary shaft holding member for fixing the rotary shaft under pressure and frictionally driving the rotary shaft to be integrated with the rotary shaft holding member and driven in a reverse phase. The drive member is driven by a total of two drive members respectively mounted on the rotary shaft holding member and the rotary shaft holding drive member, and finely rotates by frictionally driving an arbitrary position of the rotary shaft, and this fine motion rotation is repeated. As a result, the rotating shaft is rotated by the stepwise motion drive for continuous rotation.

【0008】[0008]

【実施例】実施例1.以下本発明の実施例を図を用いて
説明する。図1は回転微動機構の概略構成平面図であ
る。図において、11は駆動部aであり、弾性ヒンジa
12を介して基台13に接続され、同駆動部a11には
弾性ヒンジb14を介して回転軸15を固定するための
回転軸保持部材16が接続されている。17は駆動部b
であり、弾性ヒンジc18を介して駆動部a11に接続
され、また同駆動部b17には弾性ヒンジd19を介し
て回転軸15を固定及び回転せしめるための回転軸保持
駆動部材20が接続されている。21は駆動部材aであ
り、その一端は駆動部a11に接続され、他端は基台1
3に接続されており、この駆動部材a21が伸縮するこ
とにより弾性ヒンジa12を支点とし駆動部a11が駆
動する。駆動部材b22の一端は駆動部a11に接続さ
れ、他端は駆動部b17に接続されており、この駆動部
材b22が伸縮することにより弾性ヒンジc18を支点
とし駆動部b17が駆動する。なお、これらの駆動部材
a21、b22として例えばそれぞれ印加電圧に応じて
伸縮する圧電素子で構成することができる。上記回転軸
保持部材16、回転軸保持駆動部材20は、回転軸15
を固定中、これが不用意に回転しないように、弾性ヒン
ジa12を通る回転軸外周の接線上に回転軸固定面16
a、20aが形成されている。また回転軸保持駆動部材
20の回転軸固定面20aは、回転軸15を回転せしめ
る際に回転軸外周に対し接線移動を行えるよう、弾性ヒ
ンジc18と回転軸15の中心を結ぶ直線ロに垂直な面
にもなっている。なお、上記各固定面16a、20aが
回転軸15を固定する位置は、固定軸側面の任意の位置
でよい。上記回転軸15は、回転軸保持部材16及び回
転軸保持駆動部材20で挾み込まれるように、また回転
自在に設置され、駆動部材b22の伸縮により、回転軸
保持駆動部材20との摩擦により回転せしめられる。な
お上記回転軸15の設置はピン、ベアリングのいずれで
あってもよい。また上記弾性ヒンジは板バネ、もしくは
ピン、ベアリング等の回転支持要素とバネ要素との組み
合わせのいずれであってもよい。
EXAMPLES Example 1. Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic configuration plan view of a rotary fine movement mechanism. In the figure, 11 is a drive unit a, which is an elastic hinge a.
A rotary shaft holding member 16 for fixing the rotary shaft 15 is connected to the drive unit a11 via an elastic hinge b14. 17 is a drive unit b
Is connected to the drive part a11 via an elastic hinge c18, and the drive part b17 is connected to a rotary shaft holding drive member 20 for fixing and rotating the rotary shaft 15 via an elastic hinge d19. .. Reference numeral 21 denotes a driving member a, one end of which is connected to the driving portion a11 and the other end of which is the base 1.
The drive member a21 is driven by the elastic hinge a12 as a fulcrum when the drive member a21 expands and contracts. One end of the drive member b22 is connected to the drive part a11, and the other end is connected to the drive part b17. The drive member b22 expands and contracts to drive the drive part b17 with the elastic hinge c18 as a fulcrum. The driving members a21 and b22 may be composed of, for example, piezoelectric elements that expand and contract according to the applied voltage. The rotary shaft holding member 16 and the rotary shaft holding drive member 20 are
While fixing the rotating shaft fixing surface 16 on the tangent line of the rotating shaft outer periphery passing through the elastic hinge a12 so as not to rotate carelessly.
a and 20a are formed. The rotary shaft fixing surface 20a of the rotary shaft holding drive member 20 is perpendicular to the straight line B connecting the elastic hinge c18 and the center of the rotary shaft 15 so that the rotary shaft 15 can be moved tangentially to the outer circumference of the rotary shaft 15 when the rotary shaft 15 is rotated. It is also a face. The fixed surfaces 16a and 20a may fix the rotary shaft 15 at arbitrary positions on the side surface of the fixed shaft. The rotary shaft 15 is rotatably installed so as to be sandwiched between the rotary shaft holding member 16 and the rotary shaft holding drive member 20, and due to expansion and contraction of the drive member b22, friction with the rotary shaft holding drive member 20 occurs. It can be rotated. The rotary shaft 15 may be installed using either a pin or a bearing. Further, the elastic hinge may be either a leaf spring or a combination of a rotation supporting element such as a pin and a bearing and a spring element.

【0009】次に以上のように構成された回転微動機構
の作用について説明する。図2(a)は駆動部材a21
が伸長し、駆動部a11、b17が弾性ヒンジa12を
支点とし駆動され、回転軸保持部材16が回転軸15に
接触し弾性ヒンジb14の弾性力で回転軸15を固定し
ている状態である。この状態から駆動部材a21を収縮
させて行くことにより弾性ヒンジa12を支点とし駆動
部a11、b17が移動し、図2(b)に示すように回
転軸保持駆動部材20が回転軸15に接触し、その後図
2(c)に示すように回転軸保持部材16が回転軸15
より離れ、弾性ヒンジd19の弾性力により回転軸15
が固定される。この時回転軸保持部材16は弾性ヒンジ
b14の弾性により、回転軸保持駆動部材20が回転軸
15に接触し、弾性ヒンジd19の弾性力によって回転
軸15に固定力が掛かり始めるまで回転軸15から離れ
ないようになっている。次に駆動部材b22を伸長させ
ることにより、駆動部b17が弾性ヒンジd19を支点
とし移動し、図2(d)に示すように回転軸保持駆動部
材20が回転軸15との摩擦力により回転軸15を矢印
方向に回転させる。次に駆動部材a21を伸長させて行
くことにより弾性ヒンジa12を支点とし駆動部a1
1、b17が移動し、図2(e)に示すように回転軸保
持部材16が回転軸15に接触し、その後図2(f)に
示すように回転軸保持駆動部材20が回転軸15より離
れ、弾性ヒンジb14の弾性力により回転軸15が回転
軸保持部材16に固定される。この時回転軸保持駆動部
材20は弾性ヒンジd19の弾性により、回転軸保持部
材16が回転軸15に接触し、弾性ヒンジb14の弾性
力によって回転軸15に固定力が掛かり始めるまで回転
軸15から離れないようになっている。この状態より駆
動部材b22を収縮させることにより、駆動部b17が
弾性ヒンジc18を支点とし駆動し、図2(a)の状態
にもどる。以上の手順を繰り返し行うことによって、回
転軸15は回転せしめられることになる。なお上記手順
を逆手順で行うことにより、上記手順で回転軸15を回
転させる方向と逆方向に回転させることができる。上記
実施例では、回転軸15の固定及び摩擦駆動は回転軸側
面の任意の位置であるが、回転軸上面及び下面の任意の
位置を、駆動及び固定しても同じである。
Next, the operation of the rotary fine movement mechanism configured as described above will be described. FIG. 2A shows a driving member a21.
Is extended, the driving portions a11 and b17 are driven around the elastic hinge a12 as a fulcrum, the rotary shaft holding member 16 contacts the rotary shaft 15, and the rotary shaft 15 is fixed by the elastic force of the elastic hinge b14. By contracting the drive member a21 from this state, the drive parts a11 and b17 move around the elastic hinge a12 as a fulcrum, and the rotary shaft holding drive member 20 contacts the rotary shaft 15 as shown in FIG. 2B. Then, as shown in FIG. 2C, the rotary shaft holding member 16 is rotated by the rotary shaft 15
Away from the rotary shaft 15 by the elastic force of the elastic hinge d19.
Is fixed. At this time, the rotation shaft holding member 16 is moved from the rotation shaft 15 until the rotation shaft holding drive member 20 comes into contact with the rotation shaft 15 by the elasticity of the elastic hinge b14 and the fixing force starts to be applied to the rotation shaft 15 by the elastic force of the elastic hinge d19. It doesn't leave. Next, by extending the drive member b22, the drive portion b17 moves about the elastic hinge d19 as a fulcrum, and the rotary shaft holding drive member 20 is rotated by the frictional force with the rotary shaft 15 as shown in FIG. Rotate 15 in the direction of the arrow. Next, the drive member a21 is extended to drive the drive portion a1 with the elastic hinge a12 as a fulcrum.
1 and b17 move, the rotary shaft holding member 16 contacts the rotary shaft 15 as shown in FIG. 2 (e), and then the rotary shaft holding drive member 20 comes out of the rotary shaft 15 as shown in FIG. 2 (f). The rotating shaft 15 is separated and fixed to the rotating shaft holding member 16 by the elastic force of the elastic hinge b14. At this time, the rotation shaft holding drive member 20 is moved from the rotation shaft 15 until the rotation shaft holding member 16 contacts the rotation shaft 15 due to the elasticity of the elastic hinge d19, and the fixing force starts to be applied to the rotation shaft 15 by the elastic force of the elastic hinge b14. It doesn't leave. By contracting the driving member b22 from this state, the driving portion b17 is driven with the elastic hinge c18 as a fulcrum, and the state returns to the state of FIG. 2 (a). By repeating the above procedure, the rotary shaft 15 is rotated. By performing the above procedure in the reverse order, it is possible to rotate the rotating shaft 15 in the direction opposite to the direction in which the rotating shaft 15 is rotated in the above procedure. In the above embodiment, the rotation shaft 15 is fixed and frictionally driven at any position on the side surface of the rotation shaft, but the same is true even if any position on the upper and lower surfaces of the rotation shaft is driven and fixed.

【0010】[0010]

【発明の効果】以上のように、この発明によれば、回転
軸を加圧固定する回転軸保持部材と、回転軸を加圧固定
しかつ回転軸を摩擦駆動させる回転軸保持駆動部材を一
体化して構成することによって、合計2つの駆動部材で
構成できるため、回転軸の固定と駆動の同期が機械的に
行えるので容易になり、また回転微動機構自体を回転軸
周上に配置することにより、任意の回転軸径に対応可能
でかつ回転範囲を無限にすることが可能である。
As described above, according to the present invention, the rotary shaft holding member for pressing and fixing the rotary shaft and the rotary shaft holding drive member for pressing and fixing the rotary shaft and frictionally driving the rotary shaft are integrated. This structure can be configured with a total of two drive members, so that the rotation shaft can be fixed and the drive can be synchronized mechanically, which facilitates the operation. Also, by arranging the fine rotation mechanism itself on the circumference of the rotation shaft. It is possible to correspond to an arbitrary rotation shaft diameter and to make the rotation range infinite.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施例による回転微動機構を示す
概略構成図である。
FIG. 1 is a schematic configuration diagram showing a rotary fine movement mechanism according to an embodiment of the present invention.

【図2】a〜fは上記実施例の駆動状態を示す説明図で
ある。
2A to 2F are explanatory diagrams showing driving states of the above-described embodiment.

【図3】a〜cは従来の回転微動機構を示す概略構成図
である。
3A to 3C are schematic configuration diagrams showing a conventional rotary fine movement mechanism.

【図4】a、bは従来の回転微動機構の駆動状態を示す
説明図である。
4A and 4B are explanatory views showing a driving state of a conventional rotary fine movement mechanism.

【符号の説明】[Explanation of symbols]

11 駆動部a 12 弾性ヒンジa 13 基台 14 弾性ヒンジb 15 回転軸 16 回転軸保持部材 17 駆動部b 18 弾性ヒンジc 19 弾性ヒンジd 20 回転軸保持駆動部材 21 駆動部材a 22 駆動部材b 11 drive part a 12 elastic hinge a 13 base 14 elastic hinge b 15 rotating shaft 16 rotating shaft holding member 17 driving part b 18 elastic hinge c 19 elastic hinge d 20 rotating shaft holding driving member 21 driving member a 22 driving member b

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 微動回転を繰り返し行うことで連続回転
を行う歩進動作駆動法を用いて基台上に回転自在に載置
された回転軸を回転させる機構であって、基台に支持さ
れ回転軸を加圧固定する回転軸保持部材と、回転軸を加
圧固定しかつ回転軸の任意の位置を摩擦駆動することに
よって微動回転させる上記回転軸保持部材と一体化した
回転軸保持駆動部材と、上記回転軸保持部材と回転軸保
持駆動部材を同位相で動作させる1つの駆動部材と、回
転軸を微動回転させるために回転軸保持駆動部材を駆動
させる1つの駆動部材により構成することを特徴とする
回転微動機構。
1. A mechanism for rotating a rotary shaft rotatably mounted on a base by using a stepwise motion drive method of continuously rotating by performing fine movement rotation, the mechanism being supported by the base. A rotary shaft holding member that press-fixes the rotary shaft, and a rotary shaft holding drive member that is integrated with the rotary shaft holding member that press-fixes the rotary shaft and finely rotates by frictionally driving an arbitrary position of the rotary shaft. And one drive member for operating the rotary shaft holding member and the rotary shaft holding drive member in the same phase, and one drive member for driving the rotary shaft holding drive member for finely rotating the rotary shaft. Characteristic rotary fine movement mechanism.
【請求項2】 弾性ヒンジaを介して基台に接続され、
かつ弾性ヒンジbを介して回転軸を固定するための回転
軸保持部材を接続した駆動部aと、弾性ヒンジcを介し
て上記駆動部aに接続され、かつ弾性ヒンジdを介して
回転軸を固定及び回転せしめるための回転軸保持駆動部
材を接続した駆動部bと、一端を上記駆動部aに接続し
他端を基台に接続した駆動部材aと、一端を上記駆動部
aに接続し他端を上記駆動部bに接続した駆動部材bを
備え、上記回転軸保持部材、回転軸保持駆動部材は上記
弾性ヒンジaを通る回転軸外周の接線上に回転軸固定面
が形成され、また上記回転軸保持駆動部材の回転軸固定
面は上記弾性ヒンジcと回転軸の中心を結ぶ直線に垂直
な面を形成していることを特徴とする回転微動機構。
2. Connected to a base via an elastic hinge a,
And a drive unit a to which a rotary shaft holding member for fixing the rotary shaft is connected via an elastic hinge b, and a drive unit a connected to the drive unit a via an elastic hinge c and a rotary shaft via an elastic hinge d. A drive part b connected to a rotary shaft holding drive member for fixing and rotating, a drive member a having one end connected to the drive part a and the other end connected to a base, and one end connected to the drive part a. A drive member b having the other end connected to the drive portion b is provided, and the rotary shaft holding member and the rotary shaft holding drive member have a rotary shaft fixing surface formed on a tangent line of the outer circumference of the rotary shaft passing through the elastic hinge a. The rotary fine movement mechanism, wherein the rotary shaft fixing surface of the rotary shaft holding drive member forms a surface perpendicular to a straight line connecting the elastic hinge c and the center of the rotary shaft.
JP33777291A 1991-11-26 1991-11-26 Micromotion rotating mechanism Pending JPH05153790A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33777291A JPH05153790A (en) 1991-11-26 1991-11-26 Micromotion rotating mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33777291A JPH05153790A (en) 1991-11-26 1991-11-26 Micromotion rotating mechanism

Publications (1)

Publication Number Publication Date
JPH05153790A true JPH05153790A (en) 1993-06-18

Family

ID=18311824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33777291A Pending JPH05153790A (en) 1991-11-26 1991-11-26 Micromotion rotating mechanism

Country Status (1)

Country Link
JP (1) JPH05153790A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003029844A (en) * 2001-07-17 2003-01-31 Canon Inc Method and device for controlling position
KR100756223B1 (en) * 2006-06-22 2007-09-06 전자부품연구원 Rotary actuating device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003029844A (en) * 2001-07-17 2003-01-31 Canon Inc Method and device for controlling position
KR100756223B1 (en) * 2006-06-22 2007-09-06 전자부품연구원 Rotary actuating device

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