JPS6440087U - - Google Patents
Info
- Publication number
- JPS6440087U JPS6440087U JP1987135111U JP13511187U JPS6440087U JP S6440087 U JPS6440087 U JP S6440087U JP 1987135111 U JP1987135111 U JP 1987135111U JP 13511187 U JP13511187 U JP 13511187U JP S6440087 U JPS6440087 U JP S6440087U
- Authority
- JP
- Japan
- Prior art keywords
- input arm
- fixed part
- movable part
- linear actuator
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987135111U JPH06795Y2 (ja) | 1987-09-03 | 1987-09-03 | 微動回転ステージ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987135111U JPH06795Y2 (ja) | 1987-09-03 | 1987-09-03 | 微動回転ステージ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6440087U true JPS6440087U (enExample) | 1989-03-09 |
| JPH06795Y2 JPH06795Y2 (ja) | 1994-01-05 |
Family
ID=31394452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987135111U Expired - Lifetime JPH06795Y2 (ja) | 1987-09-03 | 1987-09-03 | 微動回転ステージ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06795Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0386434A (ja) * | 1989-08-31 | 1991-04-11 | Sumitomo Heavy Ind Ltd | 精密ステージ装置 |
-
1987
- 1987-09-03 JP JP1987135111U patent/JPH06795Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0386434A (ja) * | 1989-08-31 | 1991-04-11 | Sumitomo Heavy Ind Ltd | 精密ステージ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06795Y2 (ja) | 1994-01-05 |