JPS6439628U - - Google Patents
Info
- Publication number
- JPS6439628U JPS6439628U JP13505487U JP13505487U JPS6439628U JP S6439628 U JPS6439628 U JP S6439628U JP 13505487 U JP13505487 U JP 13505487U JP 13505487 U JP13505487 U JP 13505487U JP S6439628 U JPS6439628 U JP S6439628U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film forming
- pipe
- discharge
- discharge plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 5
- 230000008021 deposition Effects 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13505487U JPS6439628U (Direct) | 1987-09-04 | 1987-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13505487U JPS6439628U (Direct) | 1987-09-04 | 1987-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6439628U true JPS6439628U (Direct) | 1989-03-09 |
Family
ID=31394350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13505487U Pending JPS6439628U (Direct) | 1987-09-04 | 1987-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6439628U (Direct) |
-
1987
- 1987-09-04 JP JP13505487U patent/JPS6439628U/ja active Pending
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