JPS6439377A - Thin film forming device - Google Patents

Thin film forming device

Info

Publication number
JPS6439377A
JPS6439377A JP19480387A JP19480387A JPS6439377A JP S6439377 A JPS6439377 A JP S6439377A JP 19480387 A JP19480387 A JP 19480387A JP 19480387 A JP19480387 A JP 19480387A JP S6439377 A JPS6439377 A JP S6439377A
Authority
JP
Japan
Prior art keywords
thin film
constant current
electrodes
film forming
forming device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19480387A
Other languages
English (en)
Other versions
JPH0830271B2 (ja
Inventor
Akio Tsumura
Zenichi Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP62194803A priority Critical patent/JPH0830271B2/ja
Publication of JPS6439377A publication Critical patent/JPS6439377A/ja
Publication of JPH0830271B2 publication Critical patent/JPH0830271B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP62194803A 1987-08-04 1987-08-04 薄膜形成装置 Expired - Lifetime JPH0830271B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62194803A JPH0830271B2 (ja) 1987-08-04 1987-08-04 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62194803A JPH0830271B2 (ja) 1987-08-04 1987-08-04 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS6439377A true JPS6439377A (en) 1989-02-09
JPH0830271B2 JPH0830271B2 (ja) 1996-03-27

Family

ID=16330520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62194803A Expired - Lifetime JPH0830271B2 (ja) 1987-08-04 1987-08-04 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPH0830271B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006131955A (ja) * 2004-11-05 2006-05-25 Fuji Electric Holdings Co Ltd 透明導電膜の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60258461A (ja) * 1984-05-29 1985-12-20 コニンクリユケ　エムバラーゲ　インダストリー　バン　レール　ビー．ブイ ウエブヘの反応的スパツタリングによる伝導性のある透明な金属酸化物膜形成のための方法とその装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60258461A (ja) * 1984-05-29 1985-12-20 コニンクリユケ　エムバラーゲ　インダストリー　バン　レール　ビー．ブイ ウエブヘの反応的スパツタリングによる伝導性のある透明な金属酸化物膜形成のための方法とその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006131955A (ja) * 2004-11-05 2006-05-25 Fuji Electric Holdings Co Ltd 透明導電膜の製造方法

Also Published As

Publication number Publication date
JPH0830271B2 (ja) 1996-03-27

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