JPS6439377A - Thin film forming device - Google Patents
Thin film forming deviceInfo
- Publication number
- JPS6439377A JPS6439377A JP19480387A JP19480387A JPS6439377A JP S6439377 A JPS6439377 A JP S6439377A JP 19480387 A JP19480387 A JP 19480387A JP 19480387 A JP19480387 A JP 19480387A JP S6439377 A JPS6439377 A JP S6439377A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- constant current
- electrodes
- film forming
- forming device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62194803A JPH0830271B2 (ja) | 1987-08-04 | 1987-08-04 | 薄膜形成装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62194803A JPH0830271B2 (ja) | 1987-08-04 | 1987-08-04 | 薄膜形成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6439377A true JPS6439377A (en) | 1989-02-09 |
JPH0830271B2 JPH0830271B2 (ja) | 1996-03-27 |
Family
ID=16330520
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62194803A Expired - Lifetime JPH0830271B2 (ja) | 1987-08-04 | 1987-08-04 | 薄膜形成装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0830271B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006131955A (ja) * | 2004-11-05 | 2006-05-25 | Fuji Electric Holdings Co Ltd | 透明導電膜の製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60258461A (ja) * | 1984-05-29 | 1985-12-20 | コニンクリユケ エムバラーゲ インダストリー バン レール ビー.ブイ | ウエブヘの反応的スパツタリングによる伝導性のある透明な金属酸化物膜形成のための方法とその装置 |
-
1987
- 1987-08-04 JP JP62194803A patent/JPH0830271B2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60258461A (ja) * | 1984-05-29 | 1985-12-20 | コニンクリユケ エムバラーゲ インダストリー バン レール ビー.ブイ | ウエブヘの反応的スパツタリングによる伝導性のある透明な金属酸化物膜形成のための方法とその装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006131955A (ja) * | 2004-11-05 | 2006-05-25 | Fuji Electric Holdings Co Ltd | 透明導電膜の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0830271B2 (ja) | 1996-03-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080327 Year of fee payment: 12 |