JPS6439329U

JPS6439329U -

Info

Publication number: JPS6439329U
Application number: JP13421687U
Authority: JP
Priority date: 1987-09-02
Filing date: 1987-09-02
Publication date: 1989-03-09

Description

[Brief explanation of the drawing]

第１図は本考案に係る一実施例の側面図、第２
図は別の実施例の側面図、第３図はさらに別の実
施例の側面図、第４図は押具、受具の各係合部の
拡大断面図、第５図は従来例の側面図である。符号説明、１：格納ケース、２：ワーク（半導
体ウエハ）、４，１４，２４：押具、５，１５，
２５：受具、４ａ，５ａ，１４ａ，１５ａ，２４
ａ，２５ａ：係合部。 Figure 1 is a side view of one embodiment of the present invention;
The figure is a side view of another embodiment, Figure 3 is a side view of yet another embodiment, Figure 4 is an enlarged sectional view of each engaging part of the pusher and receiver, and Figure 5 is a side view of the conventional example. It is a diagram. Description of symbols, 1: Storage case, 2: Work (semiconductor wafer), 4, 14, 24: Push tool, 5, 15,
25: Receiver, 4a, 5a, 14a, 15a, 24
a, 25a: Engagement part.

Claims

[Claims for Utility Model Registration] 1. A device for taking out a workpiece stored in a storage case in a predetermined direction, which is driven in the taking-out direction through a part of the storage case, and has a distal end that is connected to the workpiece. a push tool, which is supported movably in parallel to the ejection direction, and has an engagement section with the workpiece at its tip facing the engagement section of the push tool; ; when most of the workpiece is in the storage case, the workpiece is engaged and gripped by the respective engaging portions of the pusher and the receiver, and in this state, the workpiece is removed from the storage case. A workpiece take-out device characterized in that the workpiece is taken out from the outside to a predetermined location. 2 Utility Model Registration The device according to claim 1 is characterized in that the receiver is biased in the opposite direction to the workpiece take-out direction, and the engaging portion thereof is positioned near the outside of the storage case. Workpiece take-out device. 3. A workpiece take-out device according to claim 2 of the utility model registration, characterized in that the receiver can come into contact with a push tool at a predetermined portion thereof. 4. Utility Model Registration Claim 1. The workpiece take-out device according to claim 1, wherein the receiver is driven in conjunction with the pusher by a power source common to the pusher. 5 Utility Model Registration Claim 1. In the device according to claim 1, the receiving tool is driven by a power source different from the power source of the pushing tool in conjunction with the pushing tool. Device. 6. A workpiece take-out device according to any one of claims 1 to 5, wherein the workpiece is a semiconductor wafer.