JPS6437518A - Lens for illumination - Google Patents
Lens for illuminationInfo
- Publication number
- JPS6437518A JPS6437518A JP62193327A JP19332787A JPS6437518A JP S6437518 A JPS6437518 A JP S6437518A JP 62193327 A JP62193327 A JP 62193327A JP 19332787 A JP19332787 A JP 19332787A JP S6437518 A JPS6437518 A JP S6437518A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- convex surface
- illumination
- lenses
- whole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Lenses (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62193327A JPH0727116B2 (ja) | 1987-07-31 | 1987-07-31 | 照明用レンズ |
EP88111320A EP0299475B1 (en) | 1987-07-17 | 1988-07-14 | Optical system for effecting increased irradiance in peripheral area of object |
DE3851485T DE3851485T2 (de) | 1987-07-17 | 1988-07-14 | Optisches System zur Erhöhung der Beleuchtungsstärke in Peripherobjektzonen. |
KR1019880008903A KR910008066B1 (ko) | 1987-07-17 | 1988-07-16 | 피조사면의 주변부의 조도를 증가시키는 광학계 |
US07/220,624 US4878745A (en) | 1987-07-17 | 1988-07-18 | Optical system for effecting increased irradiance in peripheral area of object |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62193327A JPH0727116B2 (ja) | 1987-07-31 | 1987-07-31 | 照明用レンズ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6437518A true JPS6437518A (en) | 1989-02-08 |
JPH0727116B2 JPH0727116B2 (ja) | 1995-03-29 |
Family
ID=16306055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62193327A Expired - Lifetime JPH0727116B2 (ja) | 1987-07-17 | 1987-07-31 | 照明用レンズ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0727116B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112287418A (zh) * | 2020-08-28 | 2021-01-29 | 东莞市爱加照明科技有限公司 | 一种tir透镜优化设计的方法、终端及存储介质 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5296555A (en) * | 1976-02-09 | 1977-08-13 | American Optical Corp | Vertical illuminator for fluorescence microscope |
-
1987
- 1987-07-31 JP JP62193327A patent/JPH0727116B2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5296555A (en) * | 1976-02-09 | 1977-08-13 | American Optical Corp | Vertical illuminator for fluorescence microscope |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112287418A (zh) * | 2020-08-28 | 2021-01-29 | 东莞市爱加照明科技有限公司 | 一种tir透镜优化设计的方法、终端及存储介质 |
CN112287418B (zh) * | 2020-08-28 | 2023-12-15 | 东莞市爱加照明科技有限公司 | 一种tir透镜优化设计的方法、终端及存储介质 |
Also Published As
Publication number | Publication date |
---|---|
JPH0727116B2 (ja) | 1995-03-29 |
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