JPS6442620A - Illuminating lens - Google Patents

Illuminating lens

Info

Publication number
JPS6442620A
JPS6442620A JP62198775A JP19877587A JPS6442620A JP S6442620 A JPS6442620 A JP S6442620A JP 62198775 A JP62198775 A JP 62198775A JP 19877587 A JP19877587 A JP 19877587A JP S6442620 A JPS6442620 A JP S6442620A
Authority
JP
Japan
Prior art keywords
lens
rear surface
curvature
radius
drop
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62198775A
Other languages
Japanese (ja)
Other versions
JPH0734057B2 (en
Inventor
Kenji Endo
Haruo Uemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP62198775A priority Critical patent/JPH0734057B2/en
Priority to EP88111320A priority patent/EP0299475B1/en
Priority to DE3851485T priority patent/DE3851485T2/en
Priority to KR1019880008903A priority patent/KR910008066B1/en
Priority to US07/220,624 priority patent/US4878745A/en
Publication of JPS6442620A publication Critical patent/JPS6442620A/en
Publication of JPH0734057B2 publication Critical patent/JPH0734057B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)

Abstract

PURPOSE:To prevent a drop of the illuminance in the peripheral part on the surface to be irradiated, by constituting the titled lens of a positive lens whose rear surface is a convex surface, and a positive lens whose front surface and rear surface are a concave surface and a convex surface, respectively, so as to satisfy specific conditions. CONSTITUTION:A first lens and a second lens are constituted of a positive lens whose rear surface is a convex surface, and a positive lens whose front surface is a concave surface and whose rear surface is a convex surface, respectively, successively from a light source side. Also, they are constituted so as to satisfy expressions I, II. In the expressions I, II, (f), r2, r3, r4, n1 and n3 denote a focal distance of the whole of this illuminating lens, a radius of curvature of the rear surface of the first lens, a radius of curvature of the front surface of the second lens, a radius of curvature of the rear surface of the second lens, a refractive index of the first lens, and a refractive index of the second lens, respectively. In such a way, an illuminating lens which can illuminate uniformly the whole surface without causing a drop of the illuminance in the peripheral part on the surface to be irradiated, or by correcting a drop of the peripheral illuminance due to an image forming lens can be obtained.
JP62198775A 1987-07-17 1987-08-07 Lighting lens Expired - Fee Related JPH0734057B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP62198775A JPH0734057B2 (en) 1987-08-07 1987-08-07 Lighting lens
EP88111320A EP0299475B1 (en) 1987-07-17 1988-07-14 Optical system for effecting increased irradiance in peripheral area of object
DE3851485T DE3851485T2 (en) 1987-07-17 1988-07-14 Optical system for increasing the illuminance in peripheral object zones.
KR1019880008903A KR910008066B1 (en) 1987-07-17 1988-07-16 Optical system for effecting increased irradiance in peripheral area of object
US07/220,624 US4878745A (en) 1987-07-17 1988-07-18 Optical system for effecting increased irradiance in peripheral area of object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62198775A JPH0734057B2 (en) 1987-08-07 1987-08-07 Lighting lens

Publications (2)

Publication Number Publication Date
JPS6442620A true JPS6442620A (en) 1989-02-14
JPH0734057B2 JPH0734057B2 (en) 1995-04-12

Family

ID=16396720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62198775A Expired - Fee Related JPH0734057B2 (en) 1987-07-17 1987-08-07 Lighting lens

Country Status (1)

Country Link
JP (1) JPH0734057B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09127418A (en) * 1995-10-27 1997-05-16 Nikon Corp Illumination optical system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62178207A (en) * 1986-01-31 1987-08-05 Dainippon Screen Mfg Co Ltd Optical system for illumination

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62178207A (en) * 1986-01-31 1987-08-05 Dainippon Screen Mfg Co Ltd Optical system for illumination

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09127418A (en) * 1995-10-27 1997-05-16 Nikon Corp Illumination optical system

Also Published As

Publication number Publication date
JPH0734057B2 (en) 1995-04-12

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