JPS6437465U - - Google Patents
Info
- Publication number
- JPS6437465U JPS6437465U JP13377887U JP13377887U JPS6437465U JP S6437465 U JPS6437465 U JP S6437465U JP 13377887 U JP13377887 U JP 13377887U JP 13377887 U JP13377887 U JP 13377887U JP S6437465 U JPS6437465 U JP S6437465U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- glow discharge
- film
- aluminum
- mask body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000000354 decomposition reaction Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Chemical Vapour Deposition (AREA)
- Photoreceptors In Electrophotography (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13377887U JPH0543095Y2 (nl) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13377887U JPH0543095Y2 (nl) | 1987-08-31 | 1987-08-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6437465U true JPS6437465U (nl) | 1989-03-07 |
| JPH0543095Y2 JPH0543095Y2 (nl) | 1993-10-29 |
Family
ID=31391955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13377887U Expired - Lifetime JPH0543095Y2 (nl) | 1987-08-31 | 1987-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543095Y2 (nl) |
-
1987
- 1987-08-31 JP JP13377887U patent/JPH0543095Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543095Y2 (nl) | 1993-10-29 |